Patent Assignment Details
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Reel/Frame: | 015523/0135 | |
| Pages: | 3 |
| | Recorded: | 01/04/2005 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10944491
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Filing Dt:
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09/17/2004
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Publication #:
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Pub Dt:
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03/23/2006
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Title:
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Composition and process for ashless removal of post-etch photoresist and/or bottom anti-reflective material on a substrate
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Assignee
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7 COMMERCE DRIVE |
DANBURY, CONNECTICUT 06810 |
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Correspondence name and address
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ADVANCED TECHNOLOGY MATERIALS, INC.
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MARGARET CHAPPUIS
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7 COMMERCE DRIVE
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DANBURY, CT 06810
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