Patent Assignment Details
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| Reel/Frame: | 045697/0135 | |
| Pages: | 2 |
| | Recorded: | 05/02/2018 | | |
| Attorney Dkt #: | KLA1P270/P5264 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/15/2019
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Application #:
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15969158
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Filing Dt:
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05/02/2018
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Publication #:
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Pub Dt:
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09/12/2019
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Title:
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SCAN STRATEGIES TO MINIMIZE CHARGING EFFECTS AND RADIATION DAMAGE OF CHARGED PARTICLE BEAM METROLOGY SYSTEM
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Assignee
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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KWAN & OLYNICK LLP
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2000 HEARST AVENUE
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SUITE 305
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BERKELEY, CA 94709
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