Patent Assignment Details
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| Reel/Frame: | 030161/0136 | |
| Pages: | 3 |
| | Recorded: | 04/05/2013 | | |
| Attorney Dkt #: | SPS-016 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/08/2018
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Application #:
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13783382
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Filing Dt:
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03/03/2013
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Publication #:
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Pub Dt:
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04/10/2014
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Title:
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PROCESS GAS GENERATION FOR CLEANING OF SUBSTRATES
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Assignee
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| AKASAKA BIZ TOQER, 3-1 AKASAKA |
| 6-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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TOKYO ELECTRON U.S. HOLDINGS, INC.
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2545 W. FRYE RD., SUITE 1
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CHANDLER, AZ 85224
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