Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 018847/0138 | |
| Pages: | 4 |
| | Recorded: | 02/02/2007 | | |
| Attorney Dkt #: | NAN001 (ACCENT MERGER) |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
7
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Patent #:
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Issue Dt:
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08/06/2002
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Application #:
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09946104
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Filing Dt:
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09/04/2001
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Publication #:
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Pub Dt:
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04/11/2002
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Title:
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DETERMINATION OF CENTER OF FOCUS BY DIFFRACTION SIGNATURE ANALYSIS
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Patent #:
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Issue Dt:
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04/27/2004
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Application #:
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09952546
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Filing Dt:
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09/12/2001
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Publication #:
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Pub Dt:
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04/18/2002
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Title:
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STRUCTURE IDENTIFICATION USING SCATTERING SIGNATURES
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Patent #:
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Issue Dt:
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06/15/2004
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Application #:
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09969939
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Filing Dt:
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10/02/2001
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Publication #:
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Pub Dt:
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04/04/2002
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Title:
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DIFFERENTIAL NUMERICAL APERTURE METHODS AND DEVICE
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Patent #:
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Issue Dt:
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02/15/2005
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Application #:
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10086339
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Filing Dt:
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02/28/2002
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Publication #:
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Pub Dt:
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10/17/2002
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Title:
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LINE PROFILE ASYMMETRY MEASUREMENT USING SCATTEROMETRY
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10417996
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Filing Dt:
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04/16/2003
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Publication #:
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Pub Dt:
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10/23/2003
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Title:
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Scatterometric measurement of undercut multi-layer diffracting signatures
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Patent #:
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Issue Dt:
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09/19/2006
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Application #:
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10492111
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Filing Dt:
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04/08/2004
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Publication #:
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Pub Dt:
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11/11/2004
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Title:
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DETERMINATION OF CENTER OF FOCUS BY CROSS-SECTION ANALYSIS
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Patent #:
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Issue Dt:
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10/10/2006
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Application #:
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10820911
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Filing Dt:
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04/08/2004
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Publication #:
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Pub Dt:
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11/25/2004
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Title:
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DETERMINATION OF CENTER OF FOCUS BY PARAMETER VARIABILITY ANALYSIS
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Assignee
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| 1550 BUCKEYE DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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MICHAEL J. HALBERT
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2350 MISSION COLLEGE BLVD.
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SUITE 360
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SANTA CLARA, CA 95054
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