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Patent #:
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Issue Dt:
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09/28/1999
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Application #:
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09099997
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Filing Dt:
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06/19/1998
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Title:
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METHOD AND APPARATUS FOR MONITORING CHARGE NEUTRALIZATION OPERATION
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Patent #:
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Issue Dt:
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03/20/2001
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Application #:
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09130662
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Filing Dt:
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08/07/1998
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Title:
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TOROIDAL FILAMENT FOR PLASMA GENERATION
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Patent #:
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Issue Dt:
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10/05/1999
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Application #:
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09132591
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Filing Dt:
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08/11/1998
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Title:
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DUAL VERTICAL THERMAL PROCESSING FURNACE
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Patent #:
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Issue Dt:
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02/08/2000
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Application #:
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09134865
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Filing Dt:
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08/17/1998
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Title:
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RADIANT HEATING APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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10/24/2000
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Application #:
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09150177
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Filing Dt:
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09/10/1998
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Title:
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TIME OF FLIGHT ENERGY MEASUREMENT APPARATUS FOR AN ION BEAM IMPLANTER
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Patent #:
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Issue Dt:
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04/18/2000
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Application #:
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09162096
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Filing Dt:
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09/28/1998
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Title:
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DOSIMETRY CUP CHARGE COLLECTION IN PLASMA IMMERSION ION IMPLANTATION
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Patent #:
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Issue Dt:
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07/17/2001
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Application #:
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09162181
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Filing Dt:
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09/28/1998
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Title:
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TUNABLE AND MATCHABLE RESONATOR COIL ASSEMBLY FOR ION IMPLANTER LINEAR ACCELERATOR
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Patent #:
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Issue Dt:
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07/03/2001
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Application #:
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09179314
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Filing Dt:
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10/27/1998
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Title:
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RUTHERFORD BACKSCATTERING DETECTION FOR USE IN ION IMPLANTATION
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Patent #:
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Issue Dt:
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04/24/2001
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Application #:
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09197083
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Filing Dt:
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11/19/1998
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Title:
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ROTATABLE WORKPIECE SUPPORT INCLUDING CYCLINDRICAL WORKPIECE SUPPORT SURFACES FOR AN ION BEAM IMPLANTER
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Patent #:
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Issue Dt:
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06/05/2001
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Application #:
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09199590
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Filing Dt:
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11/25/1998
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Title:
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ION IMPLANTATION DEVICE
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Patent #:
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Issue Dt:
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08/29/2000
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Application #:
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09213925
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Filing Dt:
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12/17/1998
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Title:
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TEMPERATURE PROBE AND MEASUREMENT METHOD FOR LOW PRESSURE PROCESS
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Patent #:
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Issue Dt:
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05/15/2001
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Application #:
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09217383
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Filing Dt:
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12/21/1998
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Title:
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ELASTOMERIC SLIDING SEAL FOR VACUUM BELLOWS
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Patent #:
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Issue Dt:
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05/23/2000
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Application #:
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09217677
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Filing Dt:
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12/21/1998
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Title:
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LATERAL STRESS RELIEF MECHANISM FOR VACUUM BELLOWS
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Patent #:
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Issue Dt:
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08/15/2000
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Application #:
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09218770
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Filing Dt:
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12/22/1998
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Title:
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ION IMPLANTATION CONTROL USING CHARGE COLLECTION, OPTICAL EMISSION SPECTROSCOPY AND MASS ANALYSIS
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Patent #:
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Issue Dt:
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03/21/2000
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Application #:
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09218912
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Filing Dt:
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12/22/1998
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Title:
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WAFER TEMPERATURE MONITORING DEVICE UTILIZING FLEXIBLE THERMOCOUPLE
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Patent #:
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Issue Dt:
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03/27/2001
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Application #:
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09219669
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Filing Dt:
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12/23/1998
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Title:
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ION BEAM IMPLANTATION USING CONICAL MAGNETIC SCANNING
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Patent #:
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Issue Dt:
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03/27/2001
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Application #:
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09219686
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Filing Dt:
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12/23/1998
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Title:
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COMPACT HELICAL RESONATOR COIL FOR ION IMPLANTER LINEAR ACCELERATOR
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Patent #:
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Issue Dt:
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09/19/2000
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Application #:
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09238353
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Filing Dt:
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01/27/1999
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Title:
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OPTICAL HEATING DEVICE FOR RAPID THERMAL PROCESSING (RTP) SYSTEM
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Patent #:
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Issue Dt:
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02/27/2001
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Application #:
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09253374
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Filing Dt:
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02/19/1999
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Title:
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METHOD AND SYSTEM FOR OPERATING A VARIABLE APERTURE IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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03/27/2001
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Application #:
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09253375
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Filing Dt:
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02/19/1999
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Title:
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CONTINUOUSLY VARIABLE APERTURE FOR HIGH-ENERGY ION IMPLANTER
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Patent #:
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Issue Dt:
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03/05/2002
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Application #:
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09257626
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Filing Dt:
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02/25/1999
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Title:
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METHOD FOR STRIPPING ION IMPLANTED PHOTORESIST LAYER
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Patent #:
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Issue Dt:
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02/06/2001
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Application #:
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09280308
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Filing Dt:
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03/29/1999
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Title:
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SYSTEM AND METHOD FOR THE REAL TIME DETERMINATION OF THE IN SITU EMISSIVITY OF A WORKPIECE DURING PROCESSING
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Patent #:
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Issue Dt:
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04/24/2001
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Application #:
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09309096
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Filing Dt:
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05/10/1999
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Title:
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SYSTEM AND METHOD FOR CLEANING CONTAMINATED SURFACES IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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07/10/2001
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Application #:
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09309466
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Filing Dt:
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05/10/1999
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Title:
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SYSTEM AND METHOD FOR CLEANING SILICON-COATED SURFACES IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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04/10/2001
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Application #:
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09310090
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Filing Dt:
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05/12/1999
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Title:
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CONTROLLED AMINE POISONING FOR REDUCED SHRINKAGE OF FEATURES FORMED IN PHOTORESIST
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Patent #:
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Issue Dt:
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08/14/2001
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Application #:
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09314193
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Filing Dt:
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05/19/1999
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Title:
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SYNCHRONOUS MULTIPLEXED NEAR ZERO OVERHEAD ARCHITECTURE FOR VACUUM PROCESSES
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Patent #:
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Issue Dt:
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08/27/2002
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Application #:
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09316657
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Filing Dt:
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05/21/1999
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Title:
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DECELERATION ELECTRODE CONFIGURATION FOR ULTRA-LOW ENERGY ION IMPLANTER
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Patent #:
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Issue Dt:
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06/05/2001
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Application #:
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09336457
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Filing Dt:
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06/18/1999
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Title:
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METHOD AND SYSTEM FOR OPTIMIZING LINAC OPERATIONAL PARAMETERS
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Patent #:
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Issue Dt:
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08/28/2001
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Application #:
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09368553
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Filing Dt:
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08/05/1999
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Title:
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OXYGEN FREE PLASMA STRIPPING PROCESS
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Patent #:
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Issue Dt:
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05/29/2001
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Application #:
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09369560
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Filing Dt:
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08/06/1999
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Title:
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SYSTEM AND METHOD FOR IMPROVING ENERGY PURITY AND IMPLANT CONSISTENCY, AND FOR MINIMIZING CHARGE ACCUMULATION OF AN IMPLANTED SUBSTRATE
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Patent #:
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Issue Dt:
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10/08/2002
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Application #:
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09413131
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Filing Dt:
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10/06/1999
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Title:
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SYSTEM AND METHOD FOR DETERMINING STRAY LIGHT IN A THERMAL PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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09/11/2001
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Application #:
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09416159
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Filing Dt:
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10/11/1999
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Title:
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DECABORANE IONIZER
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Patent #:
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Issue Dt:
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12/10/2002
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Application #:
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09434617
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Filing Dt:
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11/05/1999
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Title:
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METHOD FOR DETECTING AN ENDPOINT FOR AN OXYGEN FREE PLASMA PROCESS
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Patent #:
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Issue Dt:
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07/10/2001
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Application #:
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09436681
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Filing Dt:
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11/09/1999
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Title:
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ZONE CONTROLLED RADIANT HEATING SYSTEM UTILIZING FOCUSED REFLECTOR
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Patent #:
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Issue Dt:
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04/15/2003
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Application #:
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09449338
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Filing Dt:
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11/24/1999
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Title:
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OPTIMIZED OPTICAL SYSTEM DESIGN FOR ENDPOINT DETECTION
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Patent #:
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Issue Dt:
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01/07/2003
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Application #:
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09452878
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Filing Dt:
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12/02/1999
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Title:
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UV ASSISTED CHEMICAL MODIFICATION OF PHOTORESIST
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Patent #:
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Issue Dt:
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02/19/2002
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Application #:
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09466416
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Filing Dt:
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12/17/1999
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Title:
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WAFER PROCESSING CHAMBER HAVING SEPARABLE UPPER AND LOWER HALVES
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Patent #:
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Issue Dt:
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08/06/2002
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Application #:
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09466628
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Filing Dt:
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12/17/1999
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Publication #:
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Pub Dt:
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05/02/2002
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Title:
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SERIAL WAFER HANDLING MECHANISM
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Patent #:
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Issue Dt:
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05/01/2001
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Application #:
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09466999
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Filing Dt:
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12/17/1999
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Title:
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DUAL PLASMA SOURCE FOR PLASMA PROCESS CHAMBER
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Patent #:
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Issue Dt:
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09/17/2002
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Application #:
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09467700
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Filing Dt:
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12/20/1999
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Title:
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POWER SUPPLY HARDENING FOR ION BEAM SYSTEMS
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Patent #:
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Issue Dt:
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10/16/2001
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Application #:
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09468238
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Filing Dt:
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12/21/1999
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Publication #:
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Pub Dt:
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11/08/2001
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Title:
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BELL JAR HAVING INTEGRAL GAS DISTRIBUTION CHANNELING
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Patent #:
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Issue Dt:
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09/18/2001
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Application #:
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09469068
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Filing Dt:
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12/21/1999
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Title:
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GLASS-LIKE INSULATOR FOR ELECTRICALLY ISOLATING ELECTRODES FROM ION IMPLANTER HOUSING
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Patent #:
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Issue Dt:
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10/01/2002
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Application #:
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09469661
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Filing Dt:
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12/22/1999
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Title:
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PRETREATMENT PROCESS FOR PLASMA IMMERSION ION IMPLANTATION
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Patent #:
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Issue Dt:
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12/25/2001
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Application #:
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09495704
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Filing Dt:
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02/01/2000
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Title:
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Contact temperature probe with thermal isolation
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Patent #:
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Issue Dt:
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05/11/2004
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Application #:
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09505695
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Filing Dt:
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02/17/2000
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Title:
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METHOD OF PHOTORESIST ASH RESIDUE REMOVAL
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Patent #:
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Issue Dt:
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06/10/2003
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Application #:
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09528835
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Filing Dt:
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03/20/2000
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Title:
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HIGH MODULUS, LOW DIELECTRIC CONSTANT COATINGS
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Patent #:
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Issue Dt:
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06/18/2002
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Application #:
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09531885
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Filing Dt:
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03/21/2000
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Title:
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METHOD OF STRIPPING PHOTORESIST USING RE-COATING MATERIAL
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Patent #:
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Issue Dt:
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07/24/2001
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Application #:
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09546750
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Filing Dt:
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04/11/2000
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Title:
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MICROWAVE CHOKE FOR REMOTE PLASMA GENERATOR
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Patent #:
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Issue Dt:
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10/21/2003
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Application #:
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09560538
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Filing Dt:
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04/26/2000
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Title:
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ACTIVELY-COOLED DISTRIBUTION PLATE FOR REDUCING REACTIVE GAS TEMPERATURE IN A PLASMA PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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12/31/2002
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Application #:
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09565833
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Filing Dt:
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05/05/2000
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Title:
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END-EFFECTOR WITH INTEGRATED COOLING MECHANISM
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Patent #:
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Issue Dt:
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10/08/2002
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Application #:
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09579943
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Filing Dt:
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05/26/2000
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Title:
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RAPID HEATING AND COOLING OF WORKPIECE CHUCKS
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Patent #:
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Issue Dt:
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11/25/2003
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Application #:
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09583157
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Filing Dt:
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05/30/2000
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Title:
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INTEGRATED RESONATOR AND AMPLIFIER SYSTEM
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Patent #:
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Issue Dt:
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10/23/2001
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Application #:
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09619839
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Filing Dt:
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07/20/2000
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Title:
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Integrated power oscillator RF source for plasma immersion ion implantation system
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Patent #:
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Issue Dt:
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07/02/2002
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Application #:
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09625153
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Filing Dt:
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07/25/2000
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Title:
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METHOD AND SYSTEM FOR MICROWAVE EXCITATION OF PLASMA IN AN ION BEAM GUIDE
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Patent #:
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Issue Dt:
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04/01/2003
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Application #:
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09625718
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Filing Dt:
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07/25/2000
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Title:
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WAVEGUIDE FOR MICROWAVE EXCITATION OF PLASMA IN AN ION BEAM GUIDE
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Patent #:
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Issue Dt:
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06/24/2003
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Application #:
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09633322
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Filing Dt:
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08/07/2000
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Title:
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ION SOURCE HAVING REPLACEABLE AND SPUTTERABLE SOLID SOURCE MATERIAL
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Patent #:
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Issue Dt:
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11/05/2002
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Application #:
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09654379
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Filing Dt:
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09/01/2000
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Title:
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SYSTEM AND METHOD FOR REMOVING CONTAMINANT PARTICLES RELATIVE TO AN ION BEAM
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Patent #:
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Issue Dt:
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03/18/2003
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Application #:
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09654380
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Filing Dt:
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09/01/2000
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Title:
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ELECTROSTATIC TRAP FOR PARTICLES ENTRAINED IN AN ION BEAM
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Patent #:
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Issue Dt:
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02/25/2003
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Application #:
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09654381
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Filing Dt:
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09/01/2000
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Title:
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SYSTEM AND METHOD FOR REMOVING PARTICLES ENTRAINED IN AN ION BEAM
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Patent #:
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Issue Dt:
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02/04/2003
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Application #:
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09654958
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Filing Dt:
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09/05/2000
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Title:
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BULK GAS DELIVERY SYSTEM FOR ION IMPLANTERS
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Patent #:
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Issue Dt:
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06/17/2003
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Application #:
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09670091
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Filing Dt:
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09/26/2000
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Title:
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SYSTEM AND METHOD FOR DELIVERING COOLING GAS FROM ATMOSPHERIC PRESSURE TO A HIGH VACUUM THROUGH A ROTATING SEAL IN A BATCH ION IMPLANTER
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Patent #:
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Issue Dt:
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06/24/2003
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Application #:
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09670241
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Filing Dt:
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09/26/2000
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Title:
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APPARATUS FOR THE BACKSIDE GAS COOLING OF A WAFER IN A BATCH ION IMPLANTATION SYSTEM
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Patent #:
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Issue Dt:
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08/26/2003
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Application #:
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09670712
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Filing Dt:
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09/27/2000
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Title:
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SYSTEM AND METHOD FOR CONTROLLING MOVEMENT OF A WORKPIECE IN A THERMAL PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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05/06/2003
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Application #:
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09681332
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Filing Dt:
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03/19/2001
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Publication #:
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Pub Dt:
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11/08/2001
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Title:
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PLASMA CURING PROCESS FOR POROUS SILICA THIN FILM
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Patent #:
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Issue Dt:
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04/23/2002
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Application #:
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09711646
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Filing Dt:
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11/13/2000
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Title:
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System and method for the real time determination of the in situ emmisivity and temperture of a workpiece during processing
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Patent #:
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Issue Dt:
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06/24/2003
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Application #:
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09712443
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Filing Dt:
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11/14/2000
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Title:
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PROCESS FOR REDUCING EDGE ROUGHNESS IN PATTERNED PHOTORESIST
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Patent #:
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Issue Dt:
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01/07/2003
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Application #:
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09732064
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Filing Dt:
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12/07/2000
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Publication #:
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Pub Dt:
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06/13/2002
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Title:
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CHEMICAL PLASMA CATHODE
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Patent #:
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Issue Dt:
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11/12/2002
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Application #:
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09738486
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Filing Dt:
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12/15/2000
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Publication #:
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Pub Dt:
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06/20/2002
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Title:
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METHOD AND SYSTEM FOR ICOSABORANE IMPLANTATION
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Patent #:
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Issue Dt:
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02/25/2003
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Application #:
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09742721
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Filing Dt:
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12/22/2000
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Publication #:
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Pub Dt:
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10/17/2002
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Title:
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PROCESS FOR REMOVAL OF PHOTORESIST AFTER ION IMPLANTATION
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Patent #:
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Issue Dt:
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11/26/2002
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Application #:
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09742910
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Filing Dt:
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12/20/2000
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Publication #:
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Pub Dt:
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06/20/2002
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Title:
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CONTAMINANT COLLECTOR TRAP FOR ION IMPLANTER
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Patent #:
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Issue Dt:
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08/27/2002
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Application #:
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09747452
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Filing Dt:
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12/22/2000
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Publication #:
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Pub Dt:
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08/22/2002
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Title:
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REMOTE PLASMA GENERATOR WITH SLIDING SHORT TUNER
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Patent #:
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Issue Dt:
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03/05/2002
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Application #:
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09747822
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Filing Dt:
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12/22/2000
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Publication #:
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Pub Dt:
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01/31/2002
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Title:
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Remote plasma mixer
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Patent #:
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Issue Dt:
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07/02/2002
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Application #:
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09748060
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Filing Dt:
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12/22/2000
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Publication #:
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Pub Dt:
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01/31/2002
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Title:
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DOWNSTREAM SAPPHIRE ELBOW JOINT FOR REMOTE PLASMA GENERATOR
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Patent #:
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Issue Dt:
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06/25/2002
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09749648
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Filing Dt:
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12/27/2000
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Publication #:
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Pub Dt:
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12/06/2001
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Title:
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METHOD AND APPARATUS FOR INCREASED WORKPIECE THROUGHPUT
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Patent #:
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12/02/2003
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Application #:
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09772146
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01/29/2001
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Publication #:
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Pub Dt:
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09/19/2002
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Title:
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METHOD AND SYSTEM FOR DETERMINING PRESSURE COMPENSATION FACTORS IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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04/22/2003
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Application #:
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09852221
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05/09/2001
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Pub Dt:
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11/14/2002
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Title:
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METHOD AND APPARATUS FOR THE GROUNDING OF PROCESS WAFERS BY THE USE OF CONDUCTIVE REGIONS CREATED BY ION IMPLANTATION INTO THE SURFACE OF AN ELECTROSTATIC CLAMP
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10/07/2003
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09855177
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05/14/2001
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Pub Dt:
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02/13/2003
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Title:
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PLASMA ASHING PROCESS
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Patent #:
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Issue Dt:
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12/28/2004
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Application #:
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09864003
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05/23/2001
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Pub Dt:
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12/12/2002
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Title:
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PLASMA PROCESS FOR REMOVING POLYMER AND RESIDUES FROM SUBSTRATES
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Patent #:
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07/06/2004
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09865155
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05/24/2001
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Pub Dt:
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02/07/2002
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Title:
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METHOD AND SYSTEM FOR ION BEAM CONTAINMENT IN AN ION BEAM GUIDE
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10/28/2003
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09876318
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06/07/2001
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10/04/2001
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Title:
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OXYGEN FREE PLASMA STRIPPING PROCESS
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12/16/2003
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09905031
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07/13/2001
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01/16/2003
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Title:
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WAFER TRANSPORT APPARATUS
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07/01/2003
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09905032
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07/13/2001
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Pub Dt:
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04/03/2003
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Title:
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SHALLOW ANGLE INTERFERENCE PROCESS AND APPARATUS FOR DETERMINING REAL-TIME ETCHING RATE
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07/13/2004
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09905043
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07/13/2001
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Pub Dt:
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10/10/2002
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Title:
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METHOD AND APPARATUS FOR MICRO-JET ENABLED, LOW-ENERGY ION GENERATION AND TRANSPORT IN PLASMA PROCESSING
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07/22/2003
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09905058
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07/12/2001
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Pub Dt:
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01/23/2003
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Title:
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TUNABLE RADIATION SOURCE PROVIDING A VUV WAVELENGTH PLANAR ILLUMINATION PATTERN FOR PROCESSING SEMICONDUCTOR WAFERS
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07/06/2004
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09906276
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07/16/2001
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Pub Dt:
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08/01/2002
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Title:
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PLASMA CURING OF MSQ-BASED POROUS LOW-K FILM MATERIALS
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04/15/2003
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09911682
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07/24/2001
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01/30/2003
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Title:
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PLASMA ASHING PROCESS
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10/25/2005
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09934785
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08/22/2001
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12/27/2001
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DECABORANE ION SOURCE
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06/22/2004
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09938257
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08/23/2001
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02/27/2003
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SYSTEM AND METHOD OF FAST AMBIENT SWITCHING FOR RAPID THERMAL PROCESSING
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07/05/2005
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09952649
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09/14/2001
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08/08/2002
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Title:
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PLASMA CURING PROCESS FOR POROUS LOW-K MATERIALS
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12/21/2004
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09966604
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09/27/2001
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07/11/2002
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PROBE ASSEMBLY FOR DETECTING AN ION IN A PLASMA GENERATED IN AN ION SOURCE
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08/12/2003
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10000772
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11/30/2001
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06/05/2003
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PROCESS FOR OPTICALLY ERASING CHARGE BUILDUP DURING FABRICATION OF AN INTEGRATED CIRCUIT
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05/24/2005
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10004523
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11/01/2001
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09/26/2002
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PLASMA PROCESS AND APPARATUS
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11/25/2003
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10036144
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12/26/2001
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07/04/2002
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METHOD AND APPARATUS FOR IMPROVED ION ACCELERATION IN AN ION IMPLANTATION SYSTEM
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07/15/2003
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10045363
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11/07/2001
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05/08/2003
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Title:
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METHOD FOR MOLDING A POLYMER SURFACE THAT REDUCES PARTICLE GENERATION AND SURFACE ADHESION FORCES WHILE MAINTAINING A HIGH HEAT TRANSFER COEFFICIENT
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12/16/2003
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10064219
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06/21/2002
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DIELECTRIC BARRIER DISCHARGE APPARATUS AND PROCESS FOR TREATING A SUBSTRATE
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NONE
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10065861
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11/26/2002
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05/27/2004
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Drying process for low-k dielectric films
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01/16/2007
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10071908
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02/08/2002
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08/14/2003
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REACTOR ASSEMBLY AND PROCESSING METHOD
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09/28/2004
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10113554
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03/29/2002
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10/02/2003
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12/16/2003
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10136047
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05/01/2002
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11/06/2003
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ION SOURCE PROVIDING RIBBON BEAM WITH CONTROLLABLE DENSITY PROFILE
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08/17/2004
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10153114
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05/21/2002
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09/26/2002
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Title:
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SUBSTRATE POSITIONING SYSTEM
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