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Patent #:
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Issue Dt:
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11/28/1989
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Application #:
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07202141
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Filing Dt:
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06/03/1988
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Title:
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ELECTRON CYCLOTRON RESONANCE ION SOURCE
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Patent #:
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Issue Dt:
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08/28/1990
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Application #:
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07264591
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Filing Dt:
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10/31/1988
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Title:
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WAFER HANDLING APPARATUS
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Patent #:
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Issue Dt:
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05/08/1990
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Application #:
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07264592
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Filing Dt:
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10/31/1988
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Title:
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SEALING APPARATUS FOR A VACUUM PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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07/31/1990
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Application #:
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07267421
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Filing Dt:
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11/04/1988
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Title:
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PLATEN ASSEMBLY FOR A VACUUM PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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01/02/1990
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Application #:
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07271241
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Filing Dt:
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11/14/1988
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Title:
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SKM ION SOURCE
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Patent #:
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Issue Dt:
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04/03/1990
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Application #:
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07293334
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Filing Dt:
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01/04/1989
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Title:
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UNIFORM CROSS SECTION ION BEAM SYSTEM
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Patent #:
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Issue Dt:
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12/04/1990
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Application #:
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07317224
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Filing Dt:
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02/28/1989
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Title:
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ION IMPLANTER END STATION
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Patent #:
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Issue Dt:
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07/24/1990
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Application #:
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07317225
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Filing Dt:
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02/28/1989
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Title:
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BEAM PATTERN CONTROL SYSTEM FOR AN ION IMPLANTER
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Patent #:
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Issue Dt:
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05/29/1990
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Application #:
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07317226
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Filing Dt:
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02/28/1989
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Title:
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WAFER ROTATION CONTROL FOR AN ION IMPLANTER
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Patent #:
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Issue Dt:
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01/29/1991
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Application #:
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07319257
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Filing Dt:
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03/03/1989
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Title:
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FLUID FLOW CONTROL METHOD AND APPARATUS FOR MINIMIZING PARTICLE CONTAMINATION
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Patent #:
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Issue Dt:
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12/18/1990
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Application #:
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07344863
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Filing Dt:
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04/17/1989
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Title:
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ELECTRODELESS LAMP SYSTEM WITH CONTROLLABLE SPECTRAL OUTPUT
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Patent #:
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Issue Dt:
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05/28/1991
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Application #:
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07434605
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Filing Dt:
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11/08/1989
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Title:
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SPUTTERING SYSTEM
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Patent #:
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Issue Dt:
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06/25/1991
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Application #:
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07436296
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Filing Dt:
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11/13/1989
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Title:
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ELLIPTICAL ION BEAM DISTRIBUTION METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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06/02/1992
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Application #:
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07447127
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Filing Dt:
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12/11/1989
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Title:
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SURFACE DISCHARGE RADIATION SOURCE
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Patent #:
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Issue Dt:
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06/11/1991
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Application #:
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07487158
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Filing Dt:
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03/01/1990
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Title:
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ION BEAM CONTROL SYSTEM
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Patent #:
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Issue Dt:
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04/09/1991
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Application #:
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07492454
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Filing Dt:
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03/14/1990
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Title:
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REACTION CHAMBER HAVING NON-CLOUDED WINDOW
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Patent #:
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Issue Dt:
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11/20/1990
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Application #:
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07494173
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Filing Dt:
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03/14/1990
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Title:
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TEMPERATURE CONTROLLED CHUCK FOR ELEVATED TEMPERATURE ETCH PROCESSING
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Patent #:
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Issue Dt:
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05/14/1991
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Application #:
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07566860
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Filing Dt:
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08/10/1990
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Title:
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METHOD OF PLASMA ETCHING WITH PARALLEL PLATE REACTOR HAVING A GRID
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Patent #:
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Issue Dt:
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07/16/1991
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Application #:
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07585914
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Filing Dt:
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09/21/1990
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Title:
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FLUID FLOW CONTROL METHOD AND APPARATUS FOR MINIMIZING PARTICLE CONTAMINATION
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Patent #:
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Issue Dt:
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05/11/1993
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Application #:
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07643197
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Filing Dt:
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01/18/1991
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Title:
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PARALLEL PLATE REACTOR AND METHOD OF USE
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Patent #:
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Issue Dt:
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05/12/1992
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Application #:
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07647509
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Filing Dt:
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01/29/1991
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Title:
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ION BEAM POTENTIAL DETECTION PROBE
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Patent #:
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Issue Dt:
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02/25/1992
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Application #:
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07660738
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Filing Dt:
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02/25/1991
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Title:
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REDUCED PATH ION BEAM IMPLANTER
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Patent #:
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Issue Dt:
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07/28/1992
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Application #:
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07668955
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Filing Dt:
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03/13/1991
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Title:
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ION BEAM IMPLANTATION METHOD AND APPARATUS FOR PARTICULATE CONTROL
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Patent #:
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Issue Dt:
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10/20/1992
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Application #:
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07705834
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Filing Dt:
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05/28/1991
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Title:
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PROCESS MODULE DISPENSE ARM
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Patent #:
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Issue Dt:
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11/17/1992
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Application #:
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07732778
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Filing Dt:
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07/19/1991
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Title:
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ION BEAM NEUTRALIZATION MEANS GENERATING DIFFUSE SECONDARY EMISSION ELECTRON SHOWER
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Patent #:
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Issue Dt:
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03/30/1993
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Application #:
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07767027
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Filing Dt:
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09/27/1991
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Title:
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ION BEAM PROFILING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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11/03/1992
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Application #:
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07804484
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Filing Dt:
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12/09/1991
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Title:
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METHOD AND APPARATUS FOR REDUCING TILT ANGLE VARIATIONS IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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06/08/1993
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Application #:
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07837277
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Filing Dt:
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02/18/1992
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Title:
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BROAD BEAM FLUX DENSITY CONTROL
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Patent #:
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Issue Dt:
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01/05/1993
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Application #:
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07846716
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Filing Dt:
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03/06/1992
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Title:
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ION BEAM IMPLANTER FOR PROVIDING CROSS PLANE FOCUSING
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Patent #:
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Issue Dt:
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07/20/1993
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Application #:
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07847766
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Filing Dt:
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03/05/1992
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Title:
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END STATION FOR A PARALLEL BEAM ION IMPLANTER
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Patent #:
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Issue Dt:
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11/01/1994
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Application #:
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07849719
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Filing Dt:
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03/12/1992
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Title:
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MICROWAVE DISCHARGE DEVICE WITH TMNMO CAVITY
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Patent #:
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Issue Dt:
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07/13/1993
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Application #:
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07850278
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Filing Dt:
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03/12/1992
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Title:
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MICROWAVE LAMP WITH ROTATING FIELD
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Patent #:
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Issue Dt:
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08/31/1993
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Application #:
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07913731
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Filing Dt:
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07/15/1992
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Title:
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FLUID FLOW CONTROL METHOD AND APPARATUS FOR MINIMIZING PARTICLE CONTAMINATION
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Patent #:
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Issue Dt:
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05/03/1994
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Application #:
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07995155
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Filing Dt:
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12/22/1992
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Title:
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FLUID FLOW CONTROL METHOD AND APPARATUS FOR AN ION IMPLANTER
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Patent #:
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Issue Dt:
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07/25/1995
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Application #:
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08005030
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Filing Dt:
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01/15/1993
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Title:
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WAFER SENSING AND CLAMPING MONITOR
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Patent #:
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Issue Dt:
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08/22/1995
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Application #:
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08029154
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Filing Dt:
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03/10/1993
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Title:
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WAFER RELEASE METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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05/02/1995
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Application #:
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08029658
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Filing Dt:
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03/10/1993
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Title:
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MICROWAVE EXCITED GAS LASER
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Patent #:
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Issue Dt:
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08/01/1995
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Application #:
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08080839
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Filing Dt:
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06/24/1993
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Title:
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APPARATUS FOR CONTROLLING THE BRIGHTNESS OF A MAGNETRON-EXCITED LAMP
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Patent #:
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Issue Dt:
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04/11/1995
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Application #:
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08172441
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Filing Dt:
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12/22/1993
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Title:
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SCAN AND TILT APPARATUS FOR AN ION IMPLANTER
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Patent #:
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Issue Dt:
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07/11/1995
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Application #:
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08193436
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Filing Dt:
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02/08/1994
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Title:
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ION BEAM SCAN CONTROL
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Patent #:
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Issue Dt:
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12/13/1994
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Application #:
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08198548
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Filing Dt:
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02/18/1994
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Title:
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ION BEAM CONICAL SCANNING SYSTEM
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Patent #:
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Issue Dt:
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03/12/1996
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Application #:
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08202187
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Filing Dt:
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02/25/1994
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Title:
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PLASMA ASHER WITH MICROWAVE TRAP
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Patent #:
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Issue Dt:
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05/30/1995
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Application #:
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08267437
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Filing Dt:
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06/29/1994
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Title:
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STRUCTURE FOR ALIGNMENT OF AN ION SOURCE APERTURE WITH A PREDETERMINED ION BEAM PATH
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Patent #:
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Issue Dt:
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07/02/1996
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Application #:
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08270022
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Filing Dt:
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07/01/1994
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Title:
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ION BEAM ELECTRON NEUTRALIZER
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Patent #:
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Issue Dt:
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06/04/1996
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Application #:
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08312142
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Filing Dt:
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09/26/1994
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Title:
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MICROWAVE ENERGIZED ION SOURCE FOR ION IMPLANTATION
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Patent #:
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Issue Dt:
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03/05/1996
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Application #:
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08339554
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Filing Dt:
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11/15/1994
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Title:
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ION GENERATING SOURCE FOR USE IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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11/05/1996
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Application #:
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08429843
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Filing Dt:
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04/27/1995
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Title:
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MAGNETRON VARIABLE POWER SUPPLY WITH MODING PREVENTION
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Patent #:
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Issue Dt:
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03/04/1997
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Application #:
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08458354
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Filing Dt:
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06/02/1995
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Title:
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ION IMPLANTATION DEVICE
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Patent #:
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Issue Dt:
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06/11/1996
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Application #:
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08465420
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Filing Dt:
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06/05/1995
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Title:
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AN ION IMPLANTATION DEVICE
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Patent #:
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Issue Dt:
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09/10/1996
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Application #:
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08503299
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Filing Dt:
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07/17/1995
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Title:
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IN SITU REMOVAL OF CONTAMINANTS FROM THE INTERIOR SURFACES OF AN ION BEAM IMPLANTER
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Patent #:
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Issue Dt:
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05/27/1997
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Application #:
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08519708
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Filing Dt:
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08/28/1995
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Title:
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METHOD AND APPARATUS FOR IN SITU REMOVAL OF CONTAMINANTS FROM ION BEAM NEUTRALIZATION AND IMPLANTATION APPARATUSES
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Patent #:
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Issue Dt:
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08/11/1998
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Application #:
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08531602
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Filing Dt:
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09/21/1995
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Title:
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CONTACT TEMPERATURE PROBE WITH UNRESTRAINED ORIENTATION
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Patent #:
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Issue Dt:
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09/10/1996
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Application #:
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08545135
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Filing Dt:
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10/19/1995
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Title:
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METHOD AND APPARATUS FOR ION BEAM FORMATION IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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06/16/1998
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Application #:
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08568290
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Filing Dt:
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12/06/1995
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Title:
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ELECTRODELESS LAMP STARTING/OPERATION WITH SOURCES AT DIFFERENT FREQUENCIES
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Patent #:
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Issue Dt:
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08/12/1997
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Application #:
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08574242
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Filing Dt:
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12/18/1995
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Title:
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APPARATUS FOR CAPTURING AND REMOVING CONTAMINANT PARTICLES FROM AN INTERIOR REGION OF AN ION IMPLANTER
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Patent #:
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Issue Dt:
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11/25/1997
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Application #:
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08589303
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Filing Dt:
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01/22/1996
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Title:
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METHOD AND APPARATUS FOR ION BEAM TRANSPORT
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Patent #:
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Issue Dt:
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10/05/1999
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Application #:
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08626451
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Filing Dt:
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04/02/1996
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Title:
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MICROWAVE PLASMA DISCHARGE DEVICE
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Patent #:
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Issue Dt:
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08/26/1997
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Application #:
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08655448
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Filing Dt:
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05/30/1996
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Title:
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METHOD AND APPARATUS FOR ION FORMATION IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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12/30/1997
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Application #:
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08691467
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Filing Dt:
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08/02/1996
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Title:
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METHOD AND APPARATUS FOR ION BEAM NEUTRALIZATION
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Patent #:
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Issue Dt:
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04/07/1998
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Application #:
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08696122
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Filing Dt:
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08/13/1996
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Title:
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METHOD AND APPARATUS FOR ION BEAM FORMATION IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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10/07/1997
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Application #:
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08700997
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Filing Dt:
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08/21/1996
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Title:
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SYSTEM FOR TRANSFERRING ARTICLES BETWEEN CONTROLLED ENVIRONMENTS
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Patent #:
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Issue Dt:
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10/13/1998
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Application #:
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08702257
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Filing Dt:
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08/23/1996
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Title:
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DUAL VERTICAL THERMAL PROCESSING FURNACE
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Patent #:
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Issue Dt:
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08/05/1997
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Application #:
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08728000
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Filing Dt:
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10/10/1996
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Title:
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PULSED PLATE PLASMA IMPLANTATION SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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06/09/1998
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Application #:
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08740478
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Filing Dt:
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10/30/1996
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Title:
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CATHODE MOUNTING FOR ION SOURCE WITH INDIRECTLY HEATED CATHODE
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Patent #:
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Issue Dt:
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04/20/1999
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Application #:
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08753514
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Filing Dt:
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11/26/1996
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Title:
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ION BEAM SHIELD FOR IMPLANTATION SYSTEMS
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Patent #:
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Issue Dt:
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08/11/1998
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Application #:
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08756133
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Filing Dt:
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11/26/1996
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Title:
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ION IMPLANTATION SYSTEM FOR IMPLANTING WORKPIECES
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Patent #:
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Issue Dt:
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10/20/1998
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Application #:
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08756656
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Filing Dt:
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11/26/1996
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Title:
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LARGE AREA UNIFORM ION BEAM FORMATION
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Patent #:
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Issue Dt:
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06/02/1998
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Application #:
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08756970
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Filing Dt:
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11/26/1996
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Title:
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PLASMA CHAMBER FOR CONTROLLING ION DOSAGE IN ION IMPLANTATION
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Patent #:
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Issue Dt:
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10/27/1998
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Application #:
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08756972
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Filing Dt:
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11/26/1996
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Title:
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SYSTEM AND METHOD FOR COOLING WORKPIECES PROCESSED BY AN ION IMPLANTATION SYSTEM
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Patent #:
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Issue Dt:
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09/22/1998
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Application #:
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08757726
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Filing Dt:
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11/26/1996
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Title:
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CONTROL MECHANISMS FOR DOSIMETRY CONTROL IN ION IMPLANTATION SYSTEMS
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Patent #:
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Issue Dt:
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10/13/1998
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Application #:
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08760714
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Filing Dt:
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12/05/1996
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Title:
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ION SOURCE BLOCK FILAMENT WITH LAYBRINTH CONDUCTIVE PATH
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Patent #:
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Issue Dt:
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09/23/1997
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Application #:
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08762320
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Filing Dt:
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12/09/1996
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Title:
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METHOD FOR CAPTURING AND REMOVING CONTAMINANT PARTICLES FROM AN INTERIOR REGION OF AN ION IMPLANTER
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Patent #:
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Issue Dt:
|
12/30/1997
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Application #:
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08775145
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Filing Dt:
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12/31/1996
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Title:
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ENDCAP FOR INDIRECTLY HEATED CATHODE OF ION SOURCE
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Patent #:
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Issue Dt:
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05/12/1998
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Application #:
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08779901
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Filing Dt:
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01/07/1997
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Title:
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LOADLOCK ASSEMBLY FOR AN ION IMPLANTATION SYSTEM
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Patent #:
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Issue Dt:
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06/15/1999
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Application #:
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08780808
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Filing Dt:
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01/09/1997
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Title:
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PLASMA IMMERSION IMPLANTATION WITH PULSED ANODE
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Patent #:
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Issue Dt:
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06/02/1998
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Application #:
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08785013
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Filing Dt:
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01/17/1997
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Title:
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DOSE CONTROL FOR USE IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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11/09/1999
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Application #:
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08790554
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Filing Dt:
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01/30/1997
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Title:
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DOUBLE WINDOW EXHAUST ARRANGEMENT FOR WAFER PLASMA PROCESSOR
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Patent #:
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Issue Dt:
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07/14/1998
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Application #:
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08841725
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Filing Dt:
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04/29/1997
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Title:
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ACCELERATOR-DECELERATOR ELECTROSTATIC LENS FOR VARIABLY FOCUSING AND MASS RESOLVING AN ION BEAM IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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01/30/2001
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Application #:
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08862019
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Filing Dt:
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05/22/1997
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Title:
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DUAL-WALLED EXHAUST TUBING FOR VACUUM PUMP
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Patent #:
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Issue Dt:
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05/04/1999
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Application #:
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08873351
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Filing Dt:
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06/11/1997
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Title:
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FURNACE SIDEWALL TEMPERATURE CONTROL SYSTEM
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Patent #:
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Issue Dt:
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10/05/1999
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Application #:
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08891415
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Filing Dt:
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07/10/1997
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Title:
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METHOD OF IMPLANTING LOW DOSES OF IONS INTO A SUBSTRATE
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Patent #:
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Issue Dt:
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09/29/1998
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Application #:
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08891688
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Filing Dt:
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07/11/1997
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Title:
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SYSTEM AND METHOD FOR NEUTRALIZING AN ION BEAM USING WATER VAPOR
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Patent #:
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Issue Dt:
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09/29/1998
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Application #:
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08900379
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Filing Dt:
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07/12/1997
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Title:
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SYSTEM AND METHOD FOR SETECING NEUTRAL PARTICLES IN AN ION BEAN
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Patent #:
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Issue Dt:
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09/12/2000
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Application #:
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08924096
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Filing Dt:
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09/05/1997
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Title:
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CONTROLLED SHRINKAGE OF PHOTORESIST
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Patent #:
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Issue Dt:
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06/01/1999
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Application #:
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08924969
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Filing Dt:
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09/08/1997
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Title:
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ION IMPLANTER ELECTRON SHOWER HAVING ENHANCED SECONDARY ELECTRON EMISSION
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Patent #:
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Issue Dt:
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05/11/1999
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Application #:
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08929180
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Filing Dt:
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09/08/1997
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Title:
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BIASED AND SERRATED EXTENSION TUBE FOR ION IMPLANTER ELECTRON SHOWER
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Patent #:
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Issue Dt:
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01/05/1999
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Application #:
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08931689
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Filing Dt:
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09/16/1997
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Title:
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FILAMENT FOR ION IMPLANTER PLASMA SHOWER
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Patent #:
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Issue Dt:
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07/04/2000
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Application #:
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08936548
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Filing Dt:
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09/24/1997
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Title:
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FLOURINE ASSISTED STRIPPING AND RESIDUE REMOVAL IN SAPPHIRE DOWNSTREAM PLASMA ASHER
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Patent #:
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Issue Dt:
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05/02/2000
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Application #:
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08943623
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Filing Dt:
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10/03/1997
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Title:
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CONTROLLED AMINE POISONING FOR REDUCED SHRINKAGE OF FEATURES FORMED IN PHOTORESIST
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Patent #:
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Issue Dt:
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05/02/2000
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Application #:
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09001635
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Filing Dt:
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12/31/1997
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Title:
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PLASMA DISCHARGE DEVICE AND METHOD WITH DYNAMIC TUNING
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Patent #:
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Issue Dt:
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02/29/2000
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Application #:
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09014289
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Filing Dt:
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01/27/1998
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Title:
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DEVICE FOR COOLING ELECTRODELESS LAMP WITH SUPERSONIC OUTLET JETS AND A STAGGERED MANIFOLD
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Patent #:
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Issue Dt:
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01/18/2000
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Application #:
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09014472
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Filing Dt:
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01/28/1998
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Title:
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MAGNETIC FILTER FOR ION SOURCE
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Patent #:
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Issue Dt:
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05/09/2000
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Application #:
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09031423
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Filing Dt:
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02/26/1998
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Title:
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ION SOURCE HAVING WIDE OUTPUT CURRENT OPERATING RANGE
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Patent #:
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Issue Dt:
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10/24/2000
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Application #:
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09049642
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Filing Dt:
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03/27/1998
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Title:
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METHOD FOR IN-PROCESS CLEANING OF AN ION SOURCE
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Patent #:
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Issue Dt:
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05/08/2001
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Application #:
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09060095
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Filing Dt:
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04/14/1998
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Title:
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SYNCHRONOUS MULTIPLEXED NEAR ZERO OVERHEAD ARCHITECTURE FOR VACUUM PROCESSES
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Patent #:
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Issue Dt:
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02/15/2000
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Application #:
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09066180
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Filing Dt:
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04/23/1998
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Title:
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ION IMPLANTATION SYSTEM FOR IMPLANTING WORKPIECES
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Patent #:
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Issue Dt:
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08/22/2000
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Application #:
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09070685
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Filing Dt:
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04/30/1998
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Title:
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DECABORANE VAPORIZER
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Patent #:
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Issue Dt:
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09/25/2001
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Application #:
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09081545
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Filing Dt:
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05/19/1998
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Title:
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MULTI-CUSP ION SOURCE
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Patent #:
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Issue Dt:
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07/09/2002
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Application #:
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09084238
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Filing Dt:
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05/26/1998
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Title:
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TREATMENT OF DIELECTRIC MATERIALS
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Patent #:
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Issue Dt:
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12/07/1999
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Application #:
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09095863
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Filing Dt:
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06/11/1998
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Title:
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ION DOSAGE MEASUREMENT APPARATUS FOR AN ION BEAM IMPLANTER AND METHOD
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