Total properties:
340
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Patent #:
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Issue Dt:
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09/08/2020
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Application #:
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16539819
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Filing Dt:
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08/13/2019
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Publication #:
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Pub Dt:
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12/05/2019
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Title:
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TOOL AUTO-TEACH METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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09/14/2021
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Application #:
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16552881
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Filing Dt:
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08/27/2019
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Publication #:
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Pub Dt:
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05/21/2020
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Title:
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SUBSTRATE TRANSPORT
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Patent #:
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Issue Dt:
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04/05/2022
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Application #:
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16570453
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Filing Dt:
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09/13/2019
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Publication #:
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Pub Dt:
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03/18/2021
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Title:
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METHOD AND APPARATUS FOR SUBSTRATE ALIGNMENT
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Patent #:
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Issue Dt:
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12/07/2021
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Application #:
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16592431
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Filing Dt:
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10/03/2019
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Publication #:
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Pub Dt:
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04/23/2020
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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01/03/2023
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Application #:
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16668290
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Filing Dt:
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10/30/2019
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Publication #:
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Pub Dt:
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05/07/2020
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Title:
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TRANSPORT APPARATUS WITH LINEAR BEARING
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Patent #:
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Issue Dt:
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10/24/2023
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Application #:
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16674933
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Filing Dt:
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11/05/2019
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Publication #:
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Pub Dt:
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02/27/2020
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Title:
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SEALED ROBOT DRIVE
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Patent #:
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Issue Dt:
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02/16/2021
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Application #:
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16692359
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Filing Dt:
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11/22/2019
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Publication #:
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Pub Dt:
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05/28/2020
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Title:
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LOAD PORT MODULE
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Patent #:
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Issue Dt:
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06/08/2021
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Application #:
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16692443
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Filing Dt:
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11/22/2019
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Publication #:
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Pub Dt:
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05/28/2020
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Title:
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LOAD PORT MODULE
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16696822
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Filing Dt:
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11/26/2019
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Publication #:
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Pub Dt:
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05/28/2020
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Title:
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SCALABLE MOTION CONTROL SYSTEM
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Patent #:
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Issue Dt:
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09/07/2021
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Application #:
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16702403
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Filing Dt:
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12/03/2019
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Publication #:
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Pub Dt:
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04/02/2020
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Title:
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COMPACT DIRECT DRIVE SPINDLE
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Patent #:
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Issue Dt:
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12/01/2020
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Application #:
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16722930
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Filing Dt:
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12/20/2019
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Publication #:
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Pub Dt:
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04/23/2020
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Title:
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LOAD LOCK FAST PUMP VENT
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Patent #:
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Issue Dt:
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08/23/2022
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Application #:
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16787184
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Filing Dt:
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02/11/2020
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Publication #:
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Pub Dt:
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06/11/2020
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Title:
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TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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11/23/2021
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Application #:
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16793623
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Filing Dt:
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02/18/2020
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Publication #:
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Pub Dt:
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08/13/2020
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Title:
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METHOD AND APPARATUS FOR BRUSHLESS ELECTRICAL MACHINE CONTROL
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Patent #:
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Issue Dt:
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12/07/2021
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Application #:
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16825663
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Filing Dt:
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03/20/2020
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Publication #:
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Pub Dt:
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10/08/2020
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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08/02/2022
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Application #:
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16838785
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Filing Dt:
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04/02/2020
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Publication #:
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Pub Dt:
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12/10/2020
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Title:
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POSITION FEEDBACK FOR SEALED ENVIRONMENTS
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Patent #:
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Issue Dt:
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02/15/2022
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Application #:
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16872864
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Filing Dt:
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05/12/2020
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Publication #:
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Pub Dt:
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08/27/2020
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Title:
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METHOD AND APPARATUS FOR SUBSTRATE TRANSPORT APPARATUS POSITION COMPENSATION
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16899151
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Filing Dt:
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06/11/2020
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Publication #:
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Pub Dt:
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12/17/2020
| | | | |
Title:
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SUBSTRATE PROCESS APPARATUS
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Patent #:
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Issue Dt:
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11/02/2021
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Application #:
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16942255
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Filing Dt:
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07/29/2020
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Publication #:
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Pub Dt:
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02/11/2021
| | | | |
Title:
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ROBOT EMBEDDED VISION APPARATUS
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Patent #:
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Issue Dt:
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03/28/2023
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Application #:
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16990775
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Filing Dt:
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08/11/2020
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Publication #:
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Pub Dt:
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01/28/2021
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Title:
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DUAL ARM ROBOT
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Patent #:
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Issue Dt:
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03/15/2022
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Application #:
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16996409
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Filing Dt:
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08/18/2020
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Publication #:
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Pub Dt:
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03/04/2021
| | | | |
Title:
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SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17002587
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Filing Dt:
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08/25/2020
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Publication #:
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Pub Dt:
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12/10/2020
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Title:
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WAFER ALIGNER
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Patent #:
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Issue Dt:
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10/11/2022
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Application #:
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17014575
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Filing Dt:
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09/08/2020
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Publication #:
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Pub Dt:
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04/01/2021
| | | | |
Title:
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TOOL AUTO-TEACH METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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04/12/2022
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Application #:
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17081811
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Filing Dt:
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10/27/2020
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Publication #:
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Pub Dt:
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02/11/2021
| | | | |
Title:
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SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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05/16/2023
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Application #:
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17102811
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Filing Dt:
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11/24/2020
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Publication #:
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Pub Dt:
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06/10/2021
| | | | |
Title:
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INTELLIGENT CONDITION MONITORING AND FAULT DIAGNOSTIC SYSTEM FOR PREVENTATIVE MAINTENANCE
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Patent #:
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Issue Dt:
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05/24/2022
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Application #:
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17103243
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Filing Dt:
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11/24/2020
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Publication #:
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Pub Dt:
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05/20/2021
| | | | |
Title:
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METHOD AND APPARATUS FOR HEALTH ASSESSMENT OF A TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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03/21/2023
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Application #:
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17108473
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Filing Dt:
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12/01/2020
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Publication #:
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Pub Dt:
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06/10/2021
| | | | |
Title:
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LOAD LOCK FAST PUMP VENT
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Patent #:
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Issue Dt:
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01/31/2023
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Application #:
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17108530
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Filing Dt:
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12/01/2020
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Publication #:
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Pub Dt:
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06/17/2021
| | | | |
Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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05/30/2023
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Application #:
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17136661
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Filing Dt:
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12/29/2020
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Publication #:
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Pub Dt:
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06/24/2021
| | | | |
Title:
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PROCESS APPARATUS WITH ON-THE-FLY SUBSTRATE CENTERING
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Patent #:
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Issue Dt:
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02/01/2022
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Application #:
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17156007
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Filing Dt:
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01/22/2021
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Publication #:
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Pub Dt:
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07/29/2021
| | | | |
Title:
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SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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06/06/2023
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Application #:
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17158523
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Filing Dt:
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01/26/2021
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Publication #:
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Pub Dt:
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07/22/2021
| | | | |
Title:
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TRANSPORT APPARATUS AND ADAPTER PENDANT
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17158723
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Filing Dt:
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01/26/2021
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Publication #:
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Pub Dt:
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07/22/2021
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Title:
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DUAL SCARA ARM
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Patent #:
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Issue Dt:
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07/23/2024
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Application #:
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17167831
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Filing Dt:
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02/04/2021
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Publication #:
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Pub Dt:
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08/19/2021
| | | | |
Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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10/18/2022
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Application #:
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17176949
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Filing Dt:
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02/16/2021
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Publication #:
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Pub Dt:
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08/12/2021
| | | | |
Title:
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LOAD PORT MODULE
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Patent #:
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Issue Dt:
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10/18/2022
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Application #:
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17180298
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Filing Dt:
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02/19/2021
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Publication #:
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Pub Dt:
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08/26/2021
| | | | |
Title:
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SUBSTRATE PROCESS APPARATUS
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Patent #:
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|
Issue Dt:
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10/03/2023
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Application #:
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17229495
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Filing Dt:
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04/13/2021
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Publication #:
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Pub Dt:
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09/30/2021
| | | | |
Title:
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ON THE FLY AUTOMATIC WAFER CENTERING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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03/21/2023
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Application #:
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17341638
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Filing Dt:
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06/08/2021
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Publication #:
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|
Pub Dt:
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09/23/2021
| | | | |
Title:
|
LOAD PORT MODULE
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Patent #:
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|
Issue Dt:
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06/13/2023
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Application #:
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17362565
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Filing Dt:
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06/29/2021
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Publication #:
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Pub Dt:
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02/24/2022
| | | | |
Title:
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AUTOMATED TEACH APPARATUS FOR ROBOTIC SYSTEMS AND METHOD THEREFOR
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Patent #:
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Issue Dt:
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06/04/2024
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Application #:
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17362599
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Filing Dt:
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06/29/2021
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Publication #:
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Pub Dt:
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12/30/2021
| | | | |
Title:
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SUBSTRATE MAPPING APPARATUS AND METHOD THEREFOR
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Patent #:
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NONE
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Issue Dt:
|
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Application #:
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17382858
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Filing Dt:
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07/22/2021
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Publication #:
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Pub Dt:
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11/11/2021
| | | | |
Title:
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Tray Engine and Methods for Transferring Trays to and From Tools and in Sorters
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Patent #:
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Issue Dt:
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09/19/2023
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Application #:
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17398847
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Filing Dt:
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08/10/2021
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Publication #:
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Pub Dt:
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12/02/2021
| | | | |
Title:
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AUTOMATIC WAFER CENTERING METHOD AND APPARATUS
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