Patent Assignment Details
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Reel/Frame: | 008702/0149 | |
| Pages: | 2 |
| | Recorded: | 08/27/1997 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/24/1998
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Application #:
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08920614
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Filing Dt:
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08/27/1997
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Title:
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METHOD AND APPARATUS FOR IMPROVED TEMPERATURE CONTROL IN RAPID THERMAL PROCESSING (RTP) SYSTEMS
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Assignee
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BENZSTR. 1, |
85551 KIRCHHEIM, GERMANY |
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Correspondence name and address
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RODNEY T. HODGSON
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822 PINESBRIDGE RD.
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OSSINING, NY 10562
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