Patent Assignment Details
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Reel/Frame: | 047498/0149 | |
| Pages: | 9 |
| | Recorded: | 11/14/2018 | | |
Attorney Dkt #: | HITACHI12-0002152US01 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/25/2018
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Application #:
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15820793
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Filing Dt:
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11/22/2017
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Publication #:
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Pub Dt:
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05/24/2018
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Title:
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SUBSTRATE PROCESSING APPARATUS, EXHAUST SYSTEM AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignee
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15-12, NISHI-SHIMBASHI 2-CHOME |
MINATO-KU |
TOKYO, JAPAN 105-8039 |
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Correspondence name and address
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VOLPE & KOENIG, P.C.
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30 SOUTH 17TH STREET
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SUITE 1800
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PHILADELPHIA, PA 19103
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