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Reel/Frame:030346/0155   Pages: 3
Recorded: 05/03/2013
Attorney Dkt #:P1010277
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
01/12/2016
Application #:
13886631
Filing Dt:
05/03/2013
Publication #:
Pub Dt:
09/18/2014
Title:
MEASUREMENT OF LINE-EDGE-ROUGHNESS AND LINE-WIDTH-ROUGHNESS ON PRE-LAYERED STRUCTURES
Assignors
1
Exec Dt:
04/17/2013
2
Exec Dt:
04/17/2013
3
Exec Dt:
04/17/2013
Assignee
1
16 LI-HSIN ROAD
SCIENCE-BASED INDUSTRIAL PARK
HSINCHU, TAIWAN
Correspondence name and address
STOUT, UXA, BUYAN & MULLINS LLP
4 VENTURE, SUITE 300
IRVINE, CA 92618

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