Patent Assignment Details
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Reel/Frame: | 041785/0155 | |
| Pages: | 7 |
| | Recorded: | 03/29/2017 | | |
Attorney Dkt #: | HITACHI12-0001969US01 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/10/2021
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Application #:
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15472736
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Filing Dt:
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03/29/2017
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Publication #:
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Pub Dt:
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10/19/2017
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Title:
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SUBSTRATE PROCESSING IN A PROCESS CHAMBER FOR SEMICONDUCTOR MANUFACTURING AND APPARATUS MANAGEMENT CONTROLLER WITH ERROR ANALYSIS
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Assignee
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15-12, NISHI-SHIMBASHI 2-CHOME |
MINATO-KU |
TOKYO, JAPAN 105-8039 |
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Correspondence name and address
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VOLPE AND KOENIG, P.C.
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UNITED PLAZA
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30 SOUTH 17TH STREET, 18TH FLOOR
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PHILADELPHIA, PA 19103
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