Patent Assignment Details
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| Reel/Frame: | 018096/0156 | |
| Pages: | 2 |
| | Recorded: | 07/21/2006 | | |
| Attorney Dkt #: | 107242-00035 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/09/2010
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Application #:
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10586873
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Filing Dt:
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07/21/2006
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Publication #:
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Pub Dt:
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10/02/2008
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Title:
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PROCESS CONTROL METHOD IN SPIN ETCHING AND SPIN ETCHING APPARATUS
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Assignee
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| 2174-1, HODOTA-MACHI, TAKASAKI-SHI |
| GUNMA 3703533, JAPAN |
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Correspondence name and address
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ARENT FOX PLLC
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1050 CONNECTICUT AVENUE, N.W., SUITE 400
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WASHINGTON, D.C. 20036-5339
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