Patent Assignment Details
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Reel/Frame: | 017467/0157 | |
| Pages: | 2 |
| | Recorded: | 01/10/2006 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11329991
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Filing Dt:
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01/10/2006
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Publication #:
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Pub Dt:
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05/25/2006
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Title:
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Apparatus and method to improve resist line roughness in semiconductor wafer processing
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Assignee
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NEW ORCHARD ROAD |
ARMONK, NEW YORK 10504 |
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Correspondence name and address
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DELIO & PETERSON, LLC
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121 WHITNEY AVENUE
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NEW HAVEN, CONNECTICUT 06510
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