Patent Assignment Details
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Reel/Frame: | 014513/0161 | |
| Pages: | 4 |
| | Recorded: | 08/07/2003 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/28/2006
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Application #:
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10381827
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Filing Dt:
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08/07/2003
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Publication #:
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Pub Dt:
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10/19/2006
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Title:
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ILLUMINATION SYSTEM PARTICULARLY FOR MICROLITHOGRAPHY
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Assignee
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CARL-ZEISS-STRASSE 22 |
73447 OBERKOCHEN, GERMANY |
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Correspondence name and address
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OHLANDT, GREELEY, RUGGIERO & PERLE, LLP
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CHARLES N.J. RUGGIERO
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ONE LANDMARK SQUARE, 10TH FLOOR
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STAMFORD, CT 06901-2682
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