Patent Assignment Details
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| Reel/Frame: | 005247/0162 | |
| Pages: | 3 |
| | Recorded: | 12/20/1989 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/21/1991
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Application #:
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07453593
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Filing Dt:
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12/20/1989
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Title:
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METHOD FOR REMOVING RESIDUAL MATERIAL FROM A CAVITY DURING THE MANUFACTURE OF A SEMICONDUCTOR DEVICE BY UTILIZING PLASMA SCATTERING
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Assignee
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| SAN 136-1, AMI-RI, BUBAL-UEP, ICHON-KUN |
| A CORP. OF KOREA |
| KYUNGKI-DO, KOREA, REPUBLIC OF |
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Correspondence name and address
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MERCHANT, GOULD, SMITH, EDELL,
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WELTER & SCHMIDT
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3100 NORTHWEST CENTER
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90 SOUTH 7TH ST.
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MINNEAPOLIS, MN 53402
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