Total properties:
16
|
|
Patent #:
|
|
Issue Dt:
|
03/31/1998
|
Application #:
|
08527798
|
Filing Dt:
|
09/13/1995
|
Title:
|
MULTI-STAGE TELESCOPING STRUCTURE
|
|
|
Patent #:
|
|
Issue Dt:
|
09/07/1999
|
Application #:
|
08707932
|
Filing Dt:
|
09/10/1996
|
Title:
|
CATCH CUP CLEANING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
07/18/2000
|
Application #:
|
08938396
|
Filing Dt:
|
09/26/1997
|
Title:
|
HOT PLATE OVEN FOR PROCESSING FLAT PANEL DISPLAYS AND LARGE WAFERS
|
|
|
Patent #:
|
|
Issue Dt:
|
01/23/2001
|
Application #:
|
08988288
|
Filing Dt:
|
12/10/1997
|
Title:
|
METHOD AND APPARATUS FOR ADAPTIVE PROCESS CONTROL OF CRITICAL DIMENSIONS DURING SPIN COATING PROCESS
|
|
|
Patent #:
|
|
Issue Dt:
|
06/19/2001
|
Application #:
|
09221060
|
Filing Dt:
|
12/28/1998
|
Title:
|
YIELD AND LINE WIDTH PERFORMANCE FOR LIQUID POLYMERS AND OTHER MATERIALS
|
|
|
Patent #:
|
|
Issue Dt:
|
06/12/2001
|
Application #:
|
09245445
|
Filing Dt:
|
02/05/1999
|
Title:
|
DIRECT SKEW CONTROL AND INTERLOCK OF GANTRY
|
|
|
Patent #:
|
|
Issue Dt:
|
06/05/2001
|
Application #:
|
09275360
|
Filing Dt:
|
03/23/1999
|
Title:
|
PLASMA DEPOSITION OF SPIN CHUCKS TO REDUCE CONTAMINATION OF SILICON WAFERS
|
|
|
Patent #:
|
|
Issue Dt:
|
11/27/2001
|
Application #:
|
09360851
|
Filing Dt:
|
07/24/1999
|
Title:
|
LIQUID DISPENSING SYSTEMS AND METHODS
|
|
|
Patent #:
|
|
Issue Dt:
|
01/13/2004
|
Application #:
|
09521026
|
Filing Dt:
|
03/07/2000
|
Title:
|
RECIPE CASCADING IN A WAFER PROCESSING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
10/16/2001
|
Application #:
|
09522249
|
Filing Dt:
|
03/09/2000
|
Title:
|
Liquid dispensing systems and methods
|
|
|
Patent #:
|
|
Issue Dt:
|
03/08/2005
|
Application #:
|
09602527
|
Filing Dt:
|
06/23/2000
|
Title:
|
ROBOT PRE-POSITIONING IN A WAFER PROCESSING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
06/08/2004
|
Application #:
|
09624712
|
Filing Dt:
|
07/25/2000
|
Title:
|
METHOD FOR AN IMPROVED DEVELOPING PROCESS IN WAFER PHOTOLITHOGRAPHY
|
|
|
Patent #:
|
|
Issue Dt:
|
12/30/2003
|
Application #:
|
09800060
|
Filing Dt:
|
03/05/2001
|
Publication #:
|
|
Pub Dt:
|
12/12/2002
| | | | |
Title:
|
YIELD AND LINE WIDTH PERFORMANCE FOR LIQUID POLYMERS AND OTHER MATERIALS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/18/2005
|
Application #:
|
09874073
|
Filing Dt:
|
06/04/2001
|
Publication #:
|
|
Pub Dt:
|
11/22/2001
| | | | |
Title:
|
PLASMA DEPOSITION OF SPIN CHUCKS TO REDUCE CONTAMINATION OF SILICON WAFERS
|
|
|
Patent #:
|
|
Issue Dt:
|
12/16/2003
|
Application #:
|
10013785
|
Filing Dt:
|
12/11/2001
|
Publication #:
|
|
Pub Dt:
|
08/22/2002
| | | | |
Title:
|
METHOD FOR TWO DIMENSIONAL ADAPTIVE PROCESS CONTROL OF CRITICAL DIMENSIONS DURING SPIN COATING PROCESS
|
|
|
Patent #:
|
|
Issue Dt:
|
02/28/2006
|
Application #:
|
10618175
|
Filing Dt:
|
07/11/2003
|
Publication #:
|
|
Pub Dt:
|
06/03/2004
| | | | |
Title:
|
APPARATUS FOR PROCESSING WAFERS
|
|