Patent Assignment Details
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| Reel/Frame: | 020610/0175 | |
| Pages: | 5 |
| | Recorded: | 03/06/2008 | | |
| Attorney Dkt #: | 3001.0106C |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11872266
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Filing Dt:
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10/15/2007
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Publication #:
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Pub Dt:
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04/16/2009
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Title:
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Non-Telecentric Lithography Apparatus and Method of Manufacturing Integrated Circuits
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Assignee
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| GUSTAV-HEINEMANN-RING 212 |
| MUNICH, GERMANY 81739 |
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Correspondence name and address
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PATRICK FINNAN (EDELL, SHAPIRO & FINNAN)
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1901 RESEARCH BLVD.
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SUITE 400
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ROCKVILLE, MD 20850
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