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Patent Assignment Details

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Reel/Frame:	032892/0177			Pages:	25
		Recorded:	05/13/2014
Attorney Dkt #:	EUV - BATCH 4
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 24

Patent #:	8969838	Issue Dt:	03/03/2015	Application #:	12460762	Filing Dt:	07/23/2009
Publication #:	US20100258747	Pub Dt:	10/14/2010
Title:	SYSTEMS AND METHODS FOR PROTECTING AN EUV LIGHT SOURCE CHAMBER FROM HIGH PRESSURE SOURCE MATERIAL LEAKS

Patent #:	8000212	Issue Dt:	08/16/2011	Application #:	12637961	Filing Dt:	12/15/2009
Publication #:	US20110141865	Pub Dt:	06/16/2011
Title:	METROLOGY FOR EXTREME ULTRAVIOLET LIGHT SOURCE

Patent #:	8173985	Issue Dt:	05/08/2012	Application #:	12638092	Filing Dt:	12/15/2009
Publication #:	US20110140008	Pub Dt:	06/16/2011
Title:	BEAM TRANSPORT SYSTEM FOR EXTREME ULTRAVIOLET LIGHT SOURCE

Patent #:	8304752	Issue Dt:	11/06/2012	Application #:	12638413	Filing Dt:	12/15/2009
Publication #:	US20100327192	Pub Dt:	12/30/2010
Title:	EUV LIGHT PRODUCING SYSTEM AND METHOD UTILIZING AN ALIGNMENT LASER

Patent #:	8138487	Issue Dt:	03/20/2012	Application #:	12720190	Filing Dt:	03/09/2010
Publication #:	US20100258748	Pub Dt:	10/14/2010
Title:	SYSTEM, METHOD AND APPARATUS FOR DROPLET CATCHER FOR PREVENTION OF BACKSPLASH IN A EUV GENERATION CHAMBER

Patent #:	8158960	Issue Dt:	04/17/2012	Application #:	12721317	Filing Dt:	03/10/2010
Publication #:	US20100294953	Pub Dt:	11/25/2010
Title:	LASER PRODUCED PLASMA EUV LIGHT SOURCE

Patent #:	8575575	Issue Dt:	11/05/2013	Application #:	12725167	Filing Dt:	03/16/2010
Publication #:	US20100258749	Pub Dt:	10/14/2010
Title:	SYSTEM, METHOD AND APPARATUS FOR LASER PRODUCED PLASMA EXTREME ULTRAVIOLET CHAMBER WITH HOT WALLS AND COLD COLLECTOR MIRROR

Patent #:	8653491	Issue Dt:	02/18/2014	Application #:	12725178	Filing Dt:	03/16/2010
Publication #:	US20100258750	Pub Dt:	10/14/2010
Title:	SYSTEM, METHOD AND APPARATUS FOR ALIGNING AND SYNCHRONIZING TARGET MATERIAL FOR OPTIMUM EXTREME ULTRAVIOLET LIGHT OUTPUT

Patent #:	8368039	Issue Dt:	02/05/2013	Application #:	12753938	Filing Dt:	04/05/2010
Publication #:	US20110240890	Pub Dt:	10/06/2011
Title:	EUV LIGHT SOURCE GLINT REDUCTION SYSTEM

Patent #:	8648999	Issue Dt:	02/11/2014	Application #:	12841728	Filing Dt:	07/22/2010
Publication #:	US20120019826	Pub Dt:	01/26/2012
Title:	ALIGNMENT OF LIGHT SOURCE FOCUS

Patent #:	9066412	Issue Dt:	06/23/2015	Application #:	12900762	Filing Dt:	10/08/2010
Publication #:	US20110253349	Pub Dt:	10/20/2011
Title:	SYSTEMS AND METHODS FOR COOLING AN OPTIC

Patent #:	8810902	Issue Dt:	08/19/2014	Application #:	12980939	Filing Dt:	12/29/2010
Publication #:	US20120170112	Pub Dt:	07/05/2012
Title:	MULTI-PASS OPTICAL APPARATUS

Patent #:	8263953	Issue Dt:	09/11/2012	Application #:	13075500	Filing Dt:	03/30/2011
Publication #:	US20110248191	Pub Dt:	10/13/2011
Title:	SYSTEMS AND METHODS FOR TARGET MATERIAL DELIVERY PROTECTION IN A LASER PRODUCED PLASMA EUV LIGHT SOURCE

Patent #:	8654438	Issue Dt:	02/18/2014	Application #:	13077236	Filing Dt:	03/31/2011
Publication #:	US20110317256	Pub Dt:	12/29/2011
Title:	MASTER OSCILLATOR-POWER AMPLIFIER DRIVE LASER WITH PRE-PULSE FOR EUV LIGHT SOURCE

Patent #:	8462425	Issue Dt:	06/11/2013	Application #:	13077757	Filing Dt:	03/31/2011
Publication #:	US20120092746	Pub Dt:	04/19/2012
Title:	OSCILLATOR-AMPLIFIER DRIVE LASER WITH SEED PROTECTION FOR AN EUV LIGHT SOURCE

Patent #:	8368041	Issue Dt:	02/05/2013	Application #:	13077958	Filing Dt:	03/31/2011
Publication #:	US20120248341	Pub Dt:	10/04/2012
Title:	SYSTEM AND METHOD FOR COMPENSATING FOR THERMAL EFFECTS IN AN EUV LIGHT SOURCE

Patent #:	8633459	Issue Dt:	01/21/2014	Application #:	13088166	Filing Dt:	04/15/2011
Publication #:	US20120223256	Pub Dt:	09/06/2012
Title:	SYSTEMS AND METHODS FOR OPTICS CLEANING IN AN EUV LIGHT SOURCE

Patent #:	9029813	Issue Dt:	05/12/2015	Application #:	13112784	Filing Dt:	05/20/2011
Publication #:	US20120292527	Pub Dt:	11/22/2012
Title:	FILTER FOR MATERIAL SUPPLY APPARATUS OF AN EXTREME ULTRAVIOLET LIGHT SOURCE

Patent #:	9516730	Issue Dt:	12/06/2016	Application #:	13156188	Filing Dt:	06/08/2011
Publication #:	US20120313016	Pub Dt:	12/13/2012
Title:	SYSTEMS AND METHODS FOR BUFFER GAS FLOW STABILIZATION IN A LASER PRODUCED PLASMA LIGHT SOURCE

Patent #:	8653437	Issue Dt:	02/18/2014	Application #:	13157233	Filing Dt:	06/09/2011
Publication #:	US20120080584	Pub Dt:	04/05/2012
Title:	EUV LIGHT SOURCE WITH SUBSYSTEM(S) FOR MAINTAINING LPP DRIVE LASER OUTPUT DURING EUV NON-OUTPUT PERIODS

Patent #:	8993976	Issue Dt:	03/31/2015	Application #:	13249504	Filing Dt:	09/30/2011
Publication #:	US20130043401	Pub Dt:	02/21/2013
Title:	Energy Sensors for Light Beam Alignment

Patent #:	9073098	Issue Dt:	07/07/2015	Application #:	13473529	Filing Dt:	05/16/2012
Publication #:	US20130306110	Pub Dt:	11/21/2013
Title:	Light Collector Mirror Cleaning

Patent #:	8847183	Issue Dt:	09/30/2014	Application #:	14061087	Filing Dt:	10/23/2013
Publication #:	US20140048099	Pub Dt:	02/20/2014
Title:	System, Method and Apparatus for Laser Produced Plasma Extreme Ultraviolet Chamber with Hot Walls and Cold Collector Mirror

Patent #:	9119278	Issue Dt:	08/25/2015	Application #:	14109873	Filing Dt:	12/17/2013
Publication #:	US20140103229	Pub Dt:	04/17/2014
Title:	System, Method and Apparatus for Aligning and Synchronizing Target Material for Optimum Extreme Ultraviolet Light Output

Assignor

Exec Dt:

01/06/2014

Assignee

P.O. BOX 324

VELDHOVEN, NETHERLANDS 5500 AH

Correspondence name and address
	ASML NETHERLANDS B.V.
	P.O. BOX 324
	VELDHOVEN, 5500 AH NETHERLANDS

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