Patent Assignment Details
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Reel/Frame: | 009915/0178 | |
| Pages: | 2 |
| | Recorded: | 04/22/1999 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/03/2001
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Application #:
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09296136
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Filing Dt:
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04/22/1999
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Title:
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APPARATUS AND METHOD FOR FEEDING GASES FOR USE IN SEMICONDUCTOR MANUFACTURING
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Assignees
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NISHI-KU |
3-2, ITACHIBORI 2-CHOME |
OASKA-SHI, OSAKA, JAPAN |
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MINATO-KU |
3-6, AKASAKA 5-CHOME |
TOKYO, JAPAN |
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Correspondence name and address
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GRIFFIN, BUTLER, WHISENHUNT ET AL.
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RICHARD GALLAGHER
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2300 SOUTH 9TH STREET
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SUITE PH-1
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ARLINGTON, VA 22204
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