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Total properties:
12
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Patent #:
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Issue Dt:
|
09/28/1993
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Application #:
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07921912
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Filing Dt:
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07/29/1992
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Title:
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APPLE-SHAPED MAGNETRON FOR SPUTTERING SYSTEM
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|
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Patent #:
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|
Issue Dt:
|
05/20/1997
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Application #:
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08369381
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Filing Dt:
|
01/06/1995
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Title:
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MAGNETIC ORIENTING DEVICE FOR THIN FILM DEPOSITION AND METHOD OF USE
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|
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Patent #:
|
|
Issue Dt:
|
02/03/1998
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Application #:
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08421210
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Filing Dt:
|
04/13/1995
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Title:
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RAPID THERMAL PROCESSING HIGH-PERFORMANCE MULTIZONE ILLUMINATOR FOR WAFER BACKSIDE HEATING
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|
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Patent #:
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|
Issue Dt:
|
04/03/2001
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Application #:
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08677849
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Filing Dt:
|
07/10/1996
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Title:
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HERMETICALLY-SEALED INDUCTIVELY-COUPLED PLASMA SOURCE STRUCTURE AND METHOD OF USE
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|
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Patent #:
|
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Issue Dt:
|
03/02/1999
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Application #:
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08677951
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Filing Dt:
|
07/10/1996
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Title:
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HIGH MAGNETIC FLUX CATHODE APPARATUS AND METHOD FOR HIGH-PRODUCTIVITY PHYSICAL-VAPOR DEPOSITION
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|
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Patent #:
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|
Issue Dt:
|
05/05/1998
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Application #:
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08677956
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Filing Dt:
|
07/10/1996
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Title:
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HIGH MAGNETIC FLUX PERMANENT MAGNET ARRAY APPARATUS AND METHOD FOR HIGH PRODUCTIVITY PHYSICAL VAPOR DEPOSITION
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|
|
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Patent #:
|
|
Issue Dt:
|
02/16/1999
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Application #:
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08677980
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Filing Dt:
|
07/10/1996
|
|
Title:
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PROGRAMMABLE ULTRACLEAN ELECTROMAGNETIC SUBSTRATE ROTATION APPARATUS AND METHOD FOR MICROELECTRONICS MANUFACTURING EQUIPMENT
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|
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Patent #:
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|
Issue Dt:
|
12/08/1998
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Application #:
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08678065
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Filing Dt:
|
07/10/1996
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|
Title:
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METHOD FOR MULTI-ZONE HIGH-DENSITY INDUCTIVELY-COUPLED PLASMA GENERATION
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|
|
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Patent #:
|
|
Issue Dt:
|
11/02/1999
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Application #:
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08678297
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Filing Dt:
|
07/11/1996
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Title:
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MULTI-ZONE GAS INJECTION APPARATUS AND METHOD FOR MICROELECTRONICS MANUFACTURING EQUIPMENT
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|
|
|
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Patent #:
|
|
Issue Dt:
|
08/10/1999
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Application #:
|
08678321
|
Filing Dt:
|
07/11/1996
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|
Title:
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MULTI-ZONE ILLUMINATOR FOR RAPID THERMAL PROCESSING
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/21/1999
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Application #:
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08680244
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Filing Dt:
|
07/10/1996
|
|
Title:
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METHOD FOR AUTOMATED CALIBRATION OF TEMPERATURE SENSORS IN RAPID THERMAL PROCESSING EQUIPMENT
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/21/2000
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Application #:
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08958877
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Filing Dt:
|
10/27/1997
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|
Title:
|
ULTRA-HIGH VACUUM APPARATUS AND METHOD FOR HIGH PRODUCTIVITY PHYSICAL VAPOR DEPOSITION
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|
