Patent Assignment Details
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| Reel/Frame: | 009402/0182 | |
| Pages: | 3 |
| | Recorded: | 08/19/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/10/2000
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Application #:
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09136486
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Filing Dt:
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08/19/1998
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Title:
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SYSTEMS AND METHODS FOR CONTROLLING SEMICONDUCTOR PROCESSING TOOLS USING MEASURED CURRENT FLOW TO THE TOOL
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Assignee
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| 5204 EAST BEN WHITE BOULEVARD |
| AUSTIN, TEXAS 78741 |
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Correspondence name and address
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MERCHANT, GOULD ET AL.
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TYLER L. NASIEDLAK
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3100 NORWEST CENTER
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90 SOUTH SEVENTH STREET
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MINNEAPOLIS, MN 55402-4131
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