Patent Assignment Details
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Reel/Frame: | 016684/0182 | |
| Pages: | 6 |
| | Recorded: | 06/10/2005 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/11/2011
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Application #:
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11051477
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Filing Dt:
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02/07/2005
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Publication #:
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Pub Dt:
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08/10/2006
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Title:
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METHOD FOR REMOVAL OF DEPOSITION ON AN OPTICAL ELEMENT, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
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Assignee
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DE RUN 6501 |
NL-5504 DR VELDHOVEN, NETHERLANDS |
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Correspondence name and address
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PILLSBURY WINTHROP ET AL
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P.O. BOX 10500
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1600 TYSONS BOULEVARD
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MCLEAN, VA 22102
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