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Patent #:
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Issue Dt:
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03/08/1994
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Application #:
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07771195
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Filing Dt:
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10/04/1991
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Title:
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APPARATUS AND METHOD FOR LOCATING MOBILE AND PORTABLE RADIO TERMINALS IN A RADIO NETWORK
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Patent #:
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Issue Dt:
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12/06/1994
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Application #:
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07922983
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Filing Dt:
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07/28/1992
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Title:
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TRILAYER LITHOGRAPHIC PROCESS
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Patent #:
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Issue Dt:
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04/04/1995
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Application #:
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07954505
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Filing Dt:
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09/29/1992
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Title:
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LITHOGRAPHIC PROCESS FOR PRODUCING SMALL MASK APERTURES AND PRODUCTS THEREOF
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Patent #:
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Issue Dt:
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08/08/1995
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Application #:
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07997730
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Filing Dt:
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12/30/1992
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Title:
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METHOD FOR FABRICATING A SELF-ALIGNED MULTI-LEVEL INTERCONNECT
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Patent #:
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Issue Dt:
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07/04/1995
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Application #:
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08008745
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Filing Dt:
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01/25/1993
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Title:
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METHOD FOR PROFILE CONTROL OF SELECTIVE METALLIZATION
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Patent #:
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Issue Dt:
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01/11/1994
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Application #:
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08028832
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Filing Dt:
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03/10/1993
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Title:
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PIN-HOLE PATCH METHOD FOR IMPLANTED DIELECTRIC LAYER
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Patent #:
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Issue Dt:
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08/05/1997
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Application #:
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08036049
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Filing Dt:
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03/23/1993
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Title:
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IMPLANTATION OF NUCLEATING SPECIES FOR SELECTIVE METALLIZATION AND PRODUCTS THEREOF
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Patent #:
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Issue Dt:
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07/04/1995
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Application #:
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08076569
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Filing Dt:
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06/14/1993
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Title:
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BICMOS SOI STRUCTURE HAVING VERTICAL BJT AND METHOD OF FABRICATING SAME
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Patent #:
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Issue Dt:
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03/07/1995
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Application #:
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08097714
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Filing Dt:
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07/27/1993
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Title:
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NON-AQUEOUS ELECTROLYTE SECONDARY BATTERY AND ITS PRODUCTION METHOD
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Patent #:
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Issue Dt:
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08/11/1998
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Application #:
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08113995
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Filing Dt:
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08/30/1993
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Title:
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METHOD FOR FORMING GEX SIL-X/SI/SIO2 HETEROSTRUCTURE USING GE IMPLANT
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Patent #:
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Issue Dt:
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01/23/1996
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Application #:
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08191701
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Filing Dt:
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02/04/1994
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Title:
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SILYLATED PHOTORESIST LAYER AND PLANARIZING METHOD
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Patent #:
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Issue Dt:
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07/16/1996
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Application #:
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08223706
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Filing Dt:
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04/06/1994
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Title:
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SYSTEM AND METHOD FOR ANALYZING CODED TRANSMISSION SENT TO MOBILE MESSAGE RECEIVERS
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Patent #:
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Issue Dt:
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03/10/1998
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Application #:
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08258518
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Filing Dt:
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06/10/1994
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Title:
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GE-SI SOI MOS TRANSISTOR AND METHOD OF FABRICATING SAME
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Patent #:
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Issue Dt:
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11/21/1995
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Application #:
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08261443
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Filing Dt:
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06/17/1994
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Title:
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NITRIDATION OF SIMOX BURIED OXIDE
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Patent #:
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Issue Dt:
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07/25/1995
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Application #:
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08281821
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Filing Dt:
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07/27/1994
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Title:
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SHALLOW SIMOX PROCESSING METHOD USING MOLECULAR ION IMPLANTATION
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Patent #:
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Issue Dt:
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04/07/1998
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Application #:
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08293821
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Filing Dt:
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08/22/1994
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Title:
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METHODS AND EQUIPMENT FOR ANISOTROPIC, PATTERNED CONVERSION OF COPPER INTO SELECTIVELY REMOVABLE COMPOUNDS AND FOR REMOVAL OF SAME
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Patent #:
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Issue Dt:
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05/07/1996
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Application #:
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08337280
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Filing Dt:
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11/10/1994
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Title:
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GRADED IMPLANTATION OF OXYGEN AND/OR NITROGEN CONSTITUENTS TO DEFINE BURIED ISOLATION REGION IN SEMICONDUCTOR DEVICES
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Patent #:
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Issue Dt:
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03/04/1997
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Application #:
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08357077
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Filing Dt:
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12/15/1994
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Title:
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SEMICONDUCTOR WITH IMPLANTED DIELECTRIC LAYER HAVING PATCHED PIN-HOLES
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Patent #:
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Issue Dt:
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08/13/1996
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Application #:
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08437559
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Filing Dt:
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05/09/1995
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Title:
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METHOD OF FORMING A PATTERN OF SILYLATED PLANARIZING PHOTORESIST
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Patent #:
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Issue Dt:
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09/23/1997
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Application #:
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08490193
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Filing Dt:
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06/14/1995
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Title:
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RECEIVING METHOD AND APPARATUS FOR USE IN A SPREAD-SPECTRUM COMMUNICATION SYSTEM
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Patent #:
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Issue Dt:
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10/07/1997
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Application #:
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08529625
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Filing Dt:
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09/15/1995
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Title:
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POWER DETECTOR USING A CONSTANT QUIESCENT VOLTAGE DIVIDER
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Patent #:
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Issue Dt:
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01/20/1998
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Application #:
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08546175
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Filing Dt:
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10/20/1995
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Title:
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RADIO TRANSCEIVER WITH IMPEDANCE MATCHED TEST PORT
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Patent #:
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Issue Dt:
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11/04/1997
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Application #:
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08559999
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Filing Dt:
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11/17/1995
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Title:
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SYSTEM AND METHOD OF MEASURING A BATTERY LIFETIME
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Patent #:
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Issue Dt:
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02/24/1998
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Application #:
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08579452
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Filing Dt:
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12/27/1995
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Title:
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SHARED BASE STATIONS FOR VOICE AND DATA CELLULAR TELECOMMUNICATIONS AND METHOD
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Patent #:
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Issue Dt:
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01/27/1998
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Application #:
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08586245
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Filing Dt:
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01/11/1996
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Title:
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BATTERY TRANSPOSITION SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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02/24/1998
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Application #:
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08604117
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Filing Dt:
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02/20/1996
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Title:
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SYSTEM AND METHOD FOR CORRECTING BURST ERRORS IN DIGITAL INFORMATION
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Patent #:
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Issue Dt:
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09/30/1997
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Application #:
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08616561
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Filing Dt:
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03/15/1996
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Title:
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METHOD OF MAKING MOS TRANSISTOR WITH CONTROLLED SHALLOW SOURCE/DRAIN JUNCTION
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Patent #:
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|
Issue Dt:
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11/17/1998
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Application #:
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08630130
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Filing Dt:
|
04/10/1996
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Title:
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SYSTEM AND METHOD FOR DETERMINING A MOBILE STATION HOME NETWORK SEARCH RATE
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Patent #:
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Issue Dt:
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10/19/1999
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Application #:
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08644190
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Filing Dt:
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05/10/1996
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Title:
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METHOD FOR PREVENTING OXIDATION IN THE FORMATION OF A VIA IN AN INTEGRATED CIRCUIT
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Patent #:
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Issue Dt:
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05/07/2002
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Application #:
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08653258
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Filing Dt:
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05/24/1996
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Title:
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METHOD OF FORMING POLYCRYSTALLINE SEMICONDUCTOR FILM FROM AMORPHOUS DEPOSIT BY MODULATING CRYSTALLIZATION WITH A COMBINATION OF PRE-ANNEALING AND ION IMPLANTATION
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Patent #:
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Issue Dt:
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06/22/1999
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Application #:
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08660870
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Filing Dt:
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06/10/1996
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Title:
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METHOD FOR FORMING A MULTI-LEVEL RETICLE
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Patent #:
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Issue Dt:
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05/19/1998
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Application #:
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08665013
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Filing Dt:
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06/10/1996
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Title:
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MULTIPLE EXPOSURE MASKING SYSTEM FOR FORMING MULTI-LEVEL RESIST PROFILES
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Patent #:
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Issue Dt:
|
03/28/2000
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Application #:
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08665014
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Filing Dt:
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06/10/1996
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Title:
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METHOD FOR TRANSFERRING A MULTI-LEVEL PHOTORESIST PATTERN
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Patent #:
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Issue Dt:
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10/13/1998
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Application #:
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08692379
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Filing Dt:
|
08/05/1996
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Title:
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HARD MASK METHOD FOR TRANSFERRING A MULTI-LEVEL PHOTORESIST PATTERN
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Patent #:
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Issue Dt:
|
08/11/1998
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Application #:
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08696457
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Filing Dt:
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08/14/1996
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Title:
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SYSTEM AND METHOD FOR CONSERVING BATTERY POWER IN A MOBILE STATION SEARCHING TO SELECT A SERVING CELL
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Patent #:
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Issue Dt:
|
10/14/1997
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Application #:
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08708683
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Filing Dt:
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09/05/1996
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Title:
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RAISED SOURCE/DRAIN MOS TRANSISTOR WITH COVERED EPITAXIAL NOTCHES AND FABRICATION METHOD
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Patent #:
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|
Issue Dt:
|
06/15/1999
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Application #:
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08717267
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Filing Dt:
|
09/20/1996
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Title:
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OXIDIZED DIFFUSION BARRIER SURFACE FOR THE ADHERENCE OF COPPER AND METHOD FOR SAME
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Patent #:
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|
Issue Dt:
|
06/01/1999
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Application #:
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08717315
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Filing Dt:
|
09/20/1996
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Title:
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COPPER ADHESION TO A DIFFUSION BARRIER SURFACE AND METHOD FOR SAME
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Patent #:
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|
Issue Dt:
|
06/29/1999
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Application #:
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08729567
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Filing Dt:
|
10/11/1996
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Title:
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METHOD FOR A CHEMICAL VAPOR DEPOSITION OF COPPER ON AN ION PREPARED CONDUCTIVE SURFACE
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Patent #:
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|
Issue Dt:
|
12/22/1998
|
Application #:
|
08731258
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Filing Dt:
|
10/11/1996
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Title:
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DIFFERENTIAL COPPER DEPOSITION ON INTEGRATED CIRCUIT SURFACES AND METHOD FOR SAME
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Patent #:
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|
Issue Dt:
|
04/28/1998
|
Application #:
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08745562
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Filing Dt:
|
11/08/1996
|
|
Title:
|
METHOD OF USING WATER VAPOR TO INCREASE THE CONDUCTIVITY OF COPPER DEPOSITED WITH CU(HFAC)TMVS
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Patent #:
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|
Issue Dt:
|
11/03/1998
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Application #:
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08756782
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Filing Dt:
|
11/26/1996
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Title:
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RAISED SILICIDED SOURCE/DRAIN ELECTRODE FORMATION WITH REDUCED SUBSTRATE SILICON CONSUMPTION
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Patent #:
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|
Issue Dt:
|
09/22/1998
|
Application #:
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08756783
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Filing Dt:
|
11/26/1996
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Title:
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RETRACTABLE ANTENNA CONNECTOR ASSEMBLY SYSTEM AND METHOD
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Patent #:
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|
Issue Dt:
|
09/29/1998
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Application #:
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08768647
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Filing Dt:
|
12/18/1996
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|
Title:
|
METHOD OF FORMING TRANSISTOR ELECTRODES FROSM DIRECTIONALLY DEPOSITED SILICIDE
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Patent #:
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|
Issue Dt:
|
07/18/2000
|
Application #:
|
08779640
|
Filing Dt:
|
01/07/1997
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|
Title:
|
PRECURSOR WITH (METHOXY)(METHYL)SILYLOLEFIN LIGANDS TO DEPOSIT COPPER AND METHOD FOR SAME
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Patent #:
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|
Issue Dt:
|
05/26/1998
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Application #:
|
08784038
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Filing Dt:
|
01/16/1997
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|
Title:
|
SILYLATED PHOTO-RESIST LAYER AND PLANARIZING METHOD
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Patent #:
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|
Issue Dt:
|
06/16/1998
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Application #:
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08786546
|
Filing Dt:
|
01/21/1997
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|
Title:
|
PRECURSOR WITH (ALKYLOXY)(ALKYL)-SILYLOLEFIN LIGAND TO DEPOSIT COPPER
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Patent #:
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|
Issue Dt:
|
03/24/1998
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Application #:
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08812579
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Filing Dt:
|
03/07/1997
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|
Title:
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ONE TRANSISTOR FERROELECTRIC MEMORY CELL AND METHOD OF MAKING THE SAME
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Patent #:
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|
Issue Dt:
|
10/27/1998
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Application #:
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08812580
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Filing Dt:
|
03/07/1997
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|
Title:
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METHOD FOR FORMING POLCRYSTALLINE SILICON FROM THE CRYSTALLIZATION OF MICROCRYSTALLINE SILICON
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Patent #:
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|
Issue Dt:
|
06/05/2001
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Application #:
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08821997
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Filing Dt:
|
03/22/1997
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Title:
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SYSTEM AND METHOD FOR INTUITIVELY INDICATING SIGNAL QUALITY IN A WIRELESS DIGITAL COMMUNICATIONS NETWORK
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Patent #:
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|
Issue Dt:
|
01/25/2000
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Application #:
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08834499
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Filing Dt:
|
04/04/1997
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|
Title:
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SHALLOW JUNCTION FERROELECTRIC MEMORY CELL HAVING A LATERALLY EXTENDING P-N JUNCTION AND METHOD OF MAKING THE SAME
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Patent #:
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Issue Dt:
|
08/03/1999
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Application #:
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08847916
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Filing Dt:
|
04/28/1997
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|
Title:
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MOS TRANSISTOR WITH CONTROLLED SHALLOW SOURCE/DRAIN JUNCTION, SOURCE/ DRAIN STRAP PORTIONS, AND SOURCE/DRAIN ELECTRODES ON FIELD INSULATION LAYERS
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Patent #:
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|
Issue Dt:
|
08/17/1999
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Application #:
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08861808
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Filing Dt:
|
05/22/1997
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Title:
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SYSTEM AND METHOD OF SELECTIVELY CLEANING COPPER SUBSTRATE SURFACES, IN-SITU, TO REMOVE COPPER OXIDES
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|
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Patent #:
|
|
Issue Dt:
|
08/24/1999
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Application #:
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08869534
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Filing Dt:
|
06/06/1997
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|
Title:
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SHALLOW JUNCTION FERROELECTRIC MEMORY CELL AND METHOD OF MAKING THE SAME
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|
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Patent #:
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|
Issue Dt:
|
08/03/1999
|
Application #:
|
08870161
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Filing Dt:
|
06/06/1997
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|
Title:
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TWO TRANSISTOR FERROELECTRIC MEMORY CELL
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|
|
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Patent #:
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|
Issue Dt:
|
04/11/2000
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Application #:
|
08870375
|
Filing Dt:
|
06/06/1997
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|
Title:
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METHOD OF MAKING FERROELECTRIC MEMORY CELL FOR VLSI RAM
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|
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Patent #:
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|
Issue Dt:
|
05/23/2000
|
Application #:
|
08879386
|
Filing Dt:
|
06/20/1997
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|
Title:
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THIN-FILM TRANSISTOR POLYCRYSTALLINE THIN FILM FORMATION BY NICKEL- INDUCED, RAPID THERMAL ANNEALING METHOD
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|
Patent #:
|
|
Issue Dt:
|
08/17/1999
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Application #:
|
08893285
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Filing Dt:
|
07/15/1997
|
|
Title:
|
SELECTIVE SILICIDE THIN-FILM TRANSISTOR AND METHOD FOR SAME
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|
|
|
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Patent #:
|
|
Issue Dt:
|
05/18/1999
|
Application #:
|
08896114
|
Filing Dt:
|
07/17/1997
|
|
Title:
|
LOW RESISTANCE CONTACT BETWEEN INTEGRATED CIRCUIT METAL LEVELS AND METHOD FOR SAME
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Patent #:
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|
Issue Dt:
|
10/05/1999
|
Application #:
|
08905380
|
Filing Dt:
|
08/04/1997
|
|
Title:
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SINGLE TRANSISTOR FERROELECTRIC MEMORY CELL WITH ASYMMETRICAL FERROELECTRIC POLARIZATION AND METHOD OF MAKING THE SAME
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|
Patent #:
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|
Issue Dt:
|
03/28/2000
|
Application #:
|
08911629
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Filing Dt:
|
08/15/1997
|
|
Title:
|
DUAL CLOCK POWER CONSERVATION SYSTEM AND METHOD FOR TIMING SYNCHRONOUS COMMUNICATIONS
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|
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Patent #:
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|
Issue Dt:
|
04/06/1999
|
Application #:
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08918678
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Filing Dt:
|
08/21/1997
|
|
Title:
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A METHOD FOR FABRICATING ASYMMETRIC CHANNEL DOPED STRUCTURE
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|
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Patent #:
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|
Issue Dt:
|
11/30/1999
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Application #:
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08928600
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Filing Dt:
|
09/12/1997
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|
Title:
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METHOD OF MAKING GATE AND SOURCE LINES IN TFT LCD PANELS USING PURE ALUMINUM METAL
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Patent #:
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|
Issue Dt:
|
09/07/1999
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Application #:
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08934347
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Filing Dt:
|
09/19/1997
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Title:
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RAPID THERMAL ANNEALING WITH ABSORPTIVE LAYERS FOR THIN FILM TRANSISTORS ON TRANSPARENT SUBSTRATES
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Patent #:
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Issue Dt:
|
01/11/2000
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Application #:
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08949303
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Filing Dt:
|
10/13/1997
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Title:
|
ADAPTIVE STEP-SIZE MOTION ESTIMATION BASED ON STATISTICAL SUM OF ABSOLUTE DIFFERENCES
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Patent #:
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Issue Dt:
|
02/22/2000
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Application #:
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08958137
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Filing Dt:
|
10/28/1997
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Title:
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SYSTEM AND METHOD OF ADDITIVE INTERPOLATON FOR AFFINE TRANSFORMATIONS
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|
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Patent #:
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Issue Dt:
|
04/06/1999
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Application #:
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08960011
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Filing Dt:
|
10/29/1997
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|
Title:
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SYSTEM AND METHOD FOR PEELING A POLARIZED FILM
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|
|
|
Patent #:
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Issue Dt:
|
05/25/1999
|
Application #:
|
08984789
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Filing Dt:
|
12/04/1997
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|
Title:
|
METHOD OF MANUFACTURE OF SINGLE TRANSISTOR FERROELECTRIC MEMORY CELL USING CHEMICAL-MECHANICAL POLISHING
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Patent #:
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Issue Dt:
|
06/08/1999
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Application #:
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08984801
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Filing Dt:
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12/04/1997
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Title:
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LOCOS MOS DEVICE FOR ESD PROTECTION
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Patent #:
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Issue Dt:
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04/27/1999
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Application #:
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08995112
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Filing Dt:
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12/19/1997
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Title:
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LOW TEMPERATURE SYSTEM AND METHOD FOR CVD COPPER REMOVAL
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Patent #:
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Issue Dt:
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01/04/2000
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Application #:
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09002364
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Filing Dt:
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01/02/1998
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Title:
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C-AXIS ORIENTED THIN FILM FERROELECTRIC TRANSISTOR MEMORY CELL AND METHOD OF MAKING THE SAME
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Patent #:
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Issue Dt:
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08/14/2001
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Application #:
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09004991
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Filing Dt:
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01/09/1998
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Title:
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METHOD OF MAKING METAL GATE SUB-MICRON MOS TRANSISTOR
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Patent #:
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Issue Dt:
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05/25/1999
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Application #:
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09008257
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Filing Dt:
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01/16/1998
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Title:
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MULTI-LEVEL PHOTORESIST PROFILE METHOD
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Patent #:
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Issue Dt:
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08/10/1999
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Application #:
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09008362
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Filing Dt:
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01/16/1998
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Title:
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MULTI-LEVEL RETICLE SYSTEM AND METHOD FOR FORMING MULTI-LEVEL RESIST PROFILES
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Patent #:
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Issue Dt:
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11/23/1999
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Application #:
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09023032
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Filing Dt:
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02/13/1998
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Title:
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NITRIDE OVERHANG STRUCTURES FOR THE SILICIDATION OF TRANSISTOR ELECTRODES WITH SHALLOW JUNCTION
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Patent #:
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Issue Dt:
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05/04/1999
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Application #:
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09023382
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Filing Dt:
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02/13/1998
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Title:
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METHOD OF MAIKING LOW-K FLUORINATED AMORPHOUS CARBON DIELECTRIC
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Patent #:
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Issue Dt:
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06/06/2000
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Application #:
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09023383
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Filing Dt:
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02/13/1998
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Title:
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PARTIAL SILICIDATION METHOD TO FORM SHALLOW SOURCE/DRAIN JUNCTIONS
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Patent #:
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Issue Dt:
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10/17/2000
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Application #:
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09028157
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Filing Dt:
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02/23/1998
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Title:
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FABRICATION OF A PLANAR MOSFET WITH RAISED SOURCE/DRAIN BY CHEMICAL MECHANICAL POLISHING AND NITRIDE REPLACEMENT
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Patent #:
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Issue Dt:
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09/05/2000
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Application #:
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09031143
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Filing Dt:
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02/26/1998
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Title:
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METHOD OF FORMING FULLY DEPLETED SIMOX CMOS HAVING ELECTROSTATIC DISCHARGE PROTECTION
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Patent #:
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Issue Dt:
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01/02/2001
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Application #:
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09047038
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Filing Dt:
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03/24/1998
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Title:
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TRENCH ISOLATION STRUCTURE AND METHOD FOR SAME
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Patent #:
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Issue Dt:
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02/06/2001
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Application #:
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09071234
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Filing Dt:
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04/30/1998
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Title:
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METHOD OF FORMING NITROGEN IMPLANTED ULTRATHIN GATE OXIDE FOR DUAL GATE CMOS DEVICES
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Patent #:
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Issue Dt:
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06/27/2000
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Application #:
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09082084
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Filing Dt:
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05/20/1998
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Title:
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A METHOD OF FORMING AN ULTRA-THIN SOI ELECTROSTATIC DISCHARGE PROTECTION DEVICE
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Patent #:
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Issue Dt:
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02/06/2001
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Application #:
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09088456
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Filing Dt:
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06/01/1998
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Title:
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STRESS-LOADED FILM AND METHOD FOR SAME
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Patent #:
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Issue Dt:
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06/22/1999
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Application #:
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09090802
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Filing Dt:
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06/04/1998
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Title:
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METHOD FOR MANUFACTURING A CMOS SELF- ALIGNED STRAPPED INTERCONNECTION
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Patent #:
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Issue Dt:
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05/08/2001
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Application #:
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09092831
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Filing Dt:
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06/05/1998
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Title:
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SELECTED SITE, METAL-INDUCED, CONTINUOUS CRYSTALLIZATION METHOD
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Patent #:
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Issue Dt:
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03/12/2002
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Application #:
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09108260
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Filing Dt:
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07/01/1998
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Title:
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ADHESION PROMOTION METHOD FOR CVD COPPER METALLIZATION IN IC APPLICATIONS
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Patent #:
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Issue Dt:
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04/09/2002
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Application #:
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09113667
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Filing Dt:
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07/10/1998
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Title:
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DOUBLE SIDEWALL RAISED SILICIDED SOURCE/DRAIN CMOS TRANSISTOR
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Patent #:
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Issue Dt:
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02/12/2002
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Application #:
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09118307
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Filing Dt:
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07/16/1998
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Title:
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SINGLE CRYSTAL TFT FROM CONTINUOUS TRANSITION METAL DELIVERY METHOD
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Patent #:
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Issue Dt:
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09/07/1999
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Application #:
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09122346
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Filing Dt:
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07/24/1998
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Title:
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ENHANCED CVD COPPER ADHESION BY TWO-STEP DEPOSITION PROCESS
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Patent #:
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Issue Dt:
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04/03/2001
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Application #:
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09122494
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Filing Dt:
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07/24/1998
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Title:
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ELECTROSTATIC DISCHARGE PROTECTION FOR SALICIDED DEVICES AND METHOD OF MAKING SAME
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Patent #:
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Issue Dt:
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12/14/1999
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Application #:
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09135376
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Filing Dt:
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08/17/1998
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Title:
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DIFFERENTIAL COPPER DEPOSITION ON INTEGRATED CIRCUIT SURFACES
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Patent #:
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Issue Dt:
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09/28/1999
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Application #:
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09135393
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Filing Dt:
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08/17/1998
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Title:
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POLYCRYSTALLINE SILICON FROM CRYSTALLIZATION OF MICROCRYSTALLINE SILICON AND METHOD FOR SAME
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Patent #:
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Issue Dt:
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09/04/2001
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Application #:
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09136881
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Filing Dt:
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08/19/1998
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Publication #:
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Pub Dt:
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07/26/2001
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Title:
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IN-SITU METHOD OF CLEANING A METAL-ORGANIC CHEMICAL VAPOR DEPOSITION CHAMBER
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Patent #:
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Issue Dt:
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02/08/2000
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Application #:
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09169084
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Filing Dt:
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10/08/1998
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Title:
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LOW RESISTANCE CONTACT BETWEEN CIRCUIT METAL LEVELS
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Patent #:
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Issue Dt:
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04/11/2000
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Application #:
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09187238
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Filing Dt:
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11/05/1998
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Title:
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FERROELECTRIC NONVOLATILE TRANSISTOR AND METHOD OF MAKING SAME
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Patent #:
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Issue Dt:
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09/04/2001
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Application #:
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09188020
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Filing Dt:
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11/06/1998
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Title:
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ADHESION PROMOTION METHOD FOR ELECTRO-CHEMICAL COPPER METALLIZATION IN IC APPLICATIONS
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Patent #:
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Issue Dt:
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09/18/2001
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Application #:
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09195392
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Filing Dt:
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11/18/1998
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Title:
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ASYMMETRIC MOS CHANNEL STRUCTURE WITH DRAIN EXTENSION AND METHOD FOR SAME
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Patent #:
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Issue Dt:
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06/12/2001
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09210099
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Filing Dt:
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12/11/1998
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Title:
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SUBSTITUTED PHENYLETHYLENE PRECURSOR AND SYNTHESIS METHOD
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Patent #:
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Issue Dt:
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11/30/1999
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Application #:
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09215921
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Filing Dt:
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12/18/1998
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Title:
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SUBSTITUTED ETHYLENE PRECURSOR AND SYNTHESIS METHOD
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Patent #:
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Issue Dt:
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02/01/2000
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Application #:
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09223927
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Filing Dt:
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12/31/1998
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Title:
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SEMICONDUCTOR WAFER WITH REMOVED CVD COPPER
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