Patent Assignment Details
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| Reel/Frame: | 021475/0188 | |
| Pages: | 2 |
| | Recorded: | 09/03/2008 | | |
| Attorney Dkt #: | P/1250-355 (V9167) |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/03/2012
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Application #:
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12203394
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Filing Dt:
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09/03/2008
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Publication #:
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Pub Dt:
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03/26/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD FOR PERFORMING ETCHING PROCESS WITH PHOSPHORIC ACID SOLUTION
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Assignee
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| TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME |
| HORIKAWA-DORI, KAMIGYO-KU, KYOTO 602-858, JAPAN |
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Correspondence name and address
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OSTROLENK, FABER, GERB & SOFFEN, LLP
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1180 AVENUE OF THE AMERICAS
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NEW YORK, NY 10036
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