Patent Assignment Details
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| Reel/Frame: | 012061/0189 | |
| Pages: | 3 |
| | Recorded: | 08/02/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/08/2003
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Application #:
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09920913
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Filing Dt:
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08/02/2001
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Publication #:
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Pub Dt:
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02/20/2003
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Title:
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CALIBRATION METHOD FOR MAGNETICALLY ENHANCED REACTIVE ION ETCHER
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Assignee
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 121 PARK AVENUE 3 |
| HSIN-CHU R.O.C., TAIWAN |
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Correspondence name and address
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TUNG & ASSOCIATES
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RANDY W. TUNG
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838 W. LONG LAKE ROAD
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SUITE 120
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BLOOMFIELD HILLS, MI 48302
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