Patent Assignment Details
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Reel/Frame: | 016468/0191 | |
| Pages: | 4 |
| | Recorded: | 07/05/2005 | | |
Attorney Dkt #: | 100225 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11147531
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Filing Dt:
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06/08/2005
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Publication #:
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Pub Dt:
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12/14/2006
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Title:
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Polishing composition and method for defect improvement by reduced particle stiction on copper surface
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Assignee
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870 NORTH COMMONS DRIVE |
AURORA, ILLINOIS 60504 |
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Correspondence name and address
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STEVEN WESEMAN, ESQ.
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ASSOCIATE GENERAL COUNSEL, IP
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CABOT MICROELECTRONICS CORPORATION
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870 NORTH COMMONS DRIVE
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AURORA, IL 60504
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