Patent Assignment Details
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Reel/Frame: | 009058/0192 | |
| Pages: | 3 |
| | Recorded: | 03/30/1998 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/29/1999
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Application #:
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09050176
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Filing Dt:
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03/30/1998
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Title:
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METHOD OF TRANSFERRING TARGET SUBSTRATES IN SEMICONDUCTOR PROCESSING SYSTEM
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Assignee
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3-6 AKSAKA 5-CHOME, MINATO-KU |
TOKYO 107-8481, JAPAN |
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Correspondence name and address
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OBLON SPIVAK MCCLELLAND MAIER & NEUSTADT
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MARVIN J. SPIVAK
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FOURTH FLOOR
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1755 JEFFERSON DAVIS HIGHWAY
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ARLINGTON, VIRGINIA 22202
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