Patent Assignment Details
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| Reel/Frame: | 041029/0197 | |
| Pages: | 5 |
| | Recorded: | 01/20/2017 | | |
| Attorney Dkt #: | 152833.00052/PA1547 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/28/2017
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Application #:
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14736118
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Filing Dt:
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06/10/2015
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Publication #:
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Pub Dt:
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10/01/2015
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Title:
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MINIMIZATION OF ABBE ERROR CAUSED BY TIP OR TILT BETWEEN AN ENCODER HEAD AND A WAFER STAGE FOR ARBITRARY LOCATION OF A CENTER OF ROTATION
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Assignee
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| SHINAGAWA INTERCITY TOWER C, 2-15-3 |
| KONAN, MINATO-KU |
| TOKYO, JAPAN 108-6290 |
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Correspondence name and address
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YAKOV SIDORIN
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1 SOUTH CHURCH AVE., SUITE 1700
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TUCSON, AZ 85701
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