Patent Assignment Details
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Reel/Frame: | 024207/0201 | |
| Pages: | 3 |
| | Recorded: | 04/08/2010 | | |
Attorney Dkt #: | 081468-0384918 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12730764
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Filing Dt:
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03/24/2010
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Publication #:
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Pub Dt:
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09/30/2010
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Title:
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Alignment Measurement Arrangement, Alignment Measurement Method, Device Manufacturing Method and Lithographic Apparatus
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Assignee
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DE RUN 6501 |
VELDHOVEN, NETHERLANDS NL-5504 DR |
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Correspondence name and address
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ROBERT C. F. PEREZ
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1650 TYSONS BOULEVARD, SUITE 1400
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MCLEAN, VA 22102
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