Patent Assignment Details
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Reel/Frame: | 010778/0202 | |
| Pages: | 3 |
| | Recorded: | 04/26/2000 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/21/2003
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Application #:
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09560538
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Filing Dt:
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04/26/2000
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Title:
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ACTIVELY-COOLED DISTRIBUTION PLATE FOR REDUCING REACTIVE GAS TEMPERATURE IN A PLASMA PROCESSING SYSTEM
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Assignee
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ATTN: JOHN A. KASTELIC |
1111 SUPERIOR AVENUE, EATON CENTER |
CLEVELAND, OHIO 44114 |
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Correspondence name and address
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EATON CORPORATION
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JOHN A. KASTELIC
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1111 SUPERIOR AVENUE
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EATON CENTER
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CLEVELAND, OH 44114-2584
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