Total properties:
29
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Patent #:
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Issue Dt:
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03/05/2019
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Application #:
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13173752
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Filing Dt:
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06/30/2011
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Publication #:
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Pub Dt:
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01/03/2013
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Title:
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Projected Plasma Source
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Patent #:
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Issue Dt:
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06/20/2017
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Application #:
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13597093
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Filing Dt:
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08/28/2012
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Publication #:
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Pub Dt:
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03/06/2014
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Title:
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SYSTEMS AND METHODS FOR MONITORING FAULTS, ANOMALIES, AND OTHER CHARACTERISTICS OF A SWITCHED MODE ION ENERGY DISTRIBUTION SYSTEM
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Patent #:
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Issue Dt:
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01/10/2017
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Application #:
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14320268
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Filing Dt:
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06/30/2014
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Publication #:
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Pub Dt:
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12/31/2015
| | | | |
Title:
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FREQUENCY TUNING FOR PULSED RADIO FREQUENCY PLASMA PROCESSING
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Patent #:
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Issue Dt:
|
07/18/2017
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Application #:
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14333407
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Filing Dt:
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07/16/2014
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Publication #:
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Pub Dt:
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01/22/2015
| | | | |
Title:
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SYSTEM AND METHOD FOR BALANCING CONSUMPTION OF TARGETS IN PULSED DUAL MAGNETRON SPUTTERING (DMS) PROCESSES
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Patent #:
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Issue Dt:
|
03/07/2017
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Application #:
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14334866
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Filing Dt:
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07/18/2014
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Publication #:
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Pub Dt:
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01/22/2015
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Title:
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SYSTEMS, METHODS, AND APPARATUS FOR MINIMIZING CROSS COUPLED WAFER SURFACE POTENTIALS
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Patent #:
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Issue Dt:
|
11/07/2017
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Application #:
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14697267
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Filing Dt:
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04/27/2015
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Publication #:
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Pub Dt:
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10/27/2016
| | | | |
Title:
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Rate Enhanced Pulsed DC Sputtering System
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14803815
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Filing Dt:
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07/20/2015
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Publication #:
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Pub Dt:
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01/21/2016
| | | | |
Title:
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ION ENERGY BIAS CONTROL APPARATUS
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Patent #:
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Issue Dt:
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08/06/2019
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Application #:
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14809084
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Filing Dt:
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07/24/2015
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Publication #:
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Pub Dt:
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01/26/2017
| | | | |
Title:
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SYSTEMS AND METHODS FOR SINGLE MAGNETRON SPUTTERING
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Patent #:
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Issue Dt:
|
05/23/2017
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Application #:
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14820400
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Filing Dt:
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08/06/2015
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Publication #:
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Pub Dt:
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12/03/2015
| | | | |
Title:
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IMPEDANCE-MATCHING NETWORK USING BJT SWITCHES IN VARIABLE-REACTANCE CIRCUITS
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Patent #:
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Issue Dt:
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12/26/2017
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Application #:
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14885444
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Filing Dt:
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10/16/2015
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Publication #:
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Pub Dt:
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04/21/2016
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Title:
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NOISE BASED FREQUENCY TUNING AND IDENTIFICATION OF PLASMA CHARACTERISTICS
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Patent #:
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Issue Dt:
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02/21/2017
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Application #:
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14885455
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Filing Dt:
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10/16/2015
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Publication #:
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Pub Dt:
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04/21/2016
| | | | |
Title:
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SYSTEMS AND METHODS FOR OBTAINING INFORMATION ABOUT A PLASMA LOAD
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Patent #:
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|
Issue Dt:
|
06/12/2018
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Application #:
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14935910
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Filing Dt:
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11/09/2015
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Publication #:
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Pub Dt:
|
03/03/2016
| | | | |
Title:
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POWER SUPPLY DEVICE FOR PLASMA PROCESSING
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|
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Patent #:
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|
Issue Dt:
|
02/26/2019
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Application #:
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15002213
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Filing Dt:
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01/20/2016
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Publication #:
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|
Pub Dt:
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05/19/2016
| | | | |
Title:
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CURRENT THRESHOLD RESPONSE MODE FOR ARC MANAGEMENT
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|
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Patent #:
|
|
Issue Dt:
|
02/21/2017
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Application #:
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15046563
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Filing Dt:
|
02/18/2016
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Title:
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APPARATUS FOR CONTROLLED OVERSHOOT IN A RF GENERATOR
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|
|
Patent #:
|
|
Issue Dt:
|
04/11/2017
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Application #:
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15055761
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Filing Dt:
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02/29/2016
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Publication #:
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|
Pub Dt:
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06/23/2016
| | | | |
Title:
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CHARGE REMOVAL FROM ELECTRODES IN UNIPOLAR SPUTTERING SYSTEM
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Patent #:
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|
Issue Dt:
|
03/05/2019
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Application #:
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15067060
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Filing Dt:
|
03/10/2016
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Publication #:
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|
Pub Dt:
|
09/15/2016
| | | | |
Title:
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Plasma Source Device and Methods
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|
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Patent #:
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|
Issue Dt:
|
06/06/2017
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Application #:
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15095745
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Filing Dt:
|
04/11/2016
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Publication #:
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Pub Dt:
|
01/26/2017
| | | | |
Title:
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ARC MANAGEMENT WITH VOLTAGE REVERSAL AND IMPROVED RECOVERY
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Patent #:
|
|
Issue Dt:
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01/31/2017
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Application #:
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15222597
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Filing Dt:
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07/28/2016
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Publication #:
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|
Pub Dt:
|
11/17/2016
| | | | |
Title:
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ADJUSTABLE NON-DISSIPATIVE VOLTAGE BOOSTING SNUBBER NETWORK FOR ACHIEVING LARGE BOOST VOLTAGES
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Patent #:
|
NONE
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Issue Dt:
|
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Application #:
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15226463
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Filing Dt:
|
08/02/2016
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Publication #:
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Pub Dt:
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02/08/2018
| | | | |
Title:
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APPLICATION OF DIODE BOX TO REDUCE CRAZING IN GLASS COATINGS
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Patent #:
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|
Issue Dt:
|
05/16/2017
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Application #:
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15256070
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Filing Dt:
|
09/02/2016
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Publication #:
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|
Pub Dt:
|
05/18/2017
| | | | |
Title:
|
ADJUSTABLE NON-DISSIPATIVE VOLTAGE BOOSTING SNUBBER NETWORK
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|
|
Patent #:
|
|
Issue Dt:
|
04/16/2019
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Application #:
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15374242
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Filing Dt:
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12/09/2016
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Publication #:
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Pub Dt:
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06/14/2018
| | | | |
Title:
|
GATE DRIVE CIRCUIT AND METHOD OF OPERATING THE SAME
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Patent #:
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|
Issue Dt:
|
07/18/2017
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Application #:
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15403021
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Filing Dt:
|
01/10/2017
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Publication #:
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Pub Dt:
|
05/11/2017
| | | | |
Title:
|
FREQUENCY TUNING FOR PULSED RADIO FREQUENCY PLASMA PROCESSING
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|
|
Patent #:
|
|
Issue Dt:
|
09/11/2018
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Application #:
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15415597
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Filing Dt:
|
01/25/2017
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Publication #:
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Pub Dt:
|
08/24/2017
| | | | |
Title:
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APPARATUS FOR CONTROLLED OVERSHOOT IN A RF GENERATOR
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|
|
Patent #:
|
|
Issue Dt:
|
11/30/2021
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Application #:
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15495513
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Filing Dt:
|
04/24/2017
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Publication #:
|
|
Pub Dt:
|
09/28/2017
| | | | |
Title:
|
SYSTEMS AND METHODS FOR MONITORING FAULTS, ANOMALIES, AND OTHER CHARACTERISTICS OF A SWITCHED MODE ION ENERGY DISTRIBUTION SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
12/26/2017
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Application #:
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15499567
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Filing Dt:
|
04/27/2017
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Publication #:
|
|
Pub Dt:
|
08/10/2017
| | | | |
Title:
|
FREQUENCY TUNING FOR PULSED RADIO FREQUENCY PLASMA PROCESSING
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|
|
Patent #:
|
|
Issue Dt:
|
06/25/2019
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Application #:
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15608478
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Filing Dt:
|
05/30/2017
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Publication #:
|
|
Pub Dt:
|
09/21/2017
| | | | |
Title:
|
METHOD FOR BALANCING CONSUMPTION OF TARGETS IN PULSED DUAL MAGNETRON SPUTTERING (DMS) PROCESSES
|
|
|
Patent #:
|
|
Issue Dt:
|
07/17/2018
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Application #:
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15657525
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Filing Dt:
|
07/24/2017
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Publication #:
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|
Pub Dt:
|
11/09/2017
| | | | |
Title:
|
Apparatus for Frequency Tuning in a RF Generator
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|
|
Patent #:
|
|
Issue Dt:
|
03/05/2019
|
Application #:
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15664646
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Filing Dt:
|
07/31/2017
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Publication #:
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Pub Dt:
|
11/16/2017
| | | | |
Title:
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SYSTEM AND METHOD FOR CONTROL OF HIGH EFFICIENCY GENERATOR SOURCE IMPEDANCE
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|
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Patent #:
|
|
Issue Dt:
|
05/18/2021
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Application #:
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15667239
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Filing Dt:
|
08/02/2017
|
Publication #:
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|
Pub Dt:
|
01/18/2018
| | | | |
Title:
|
SYSTEM, METHOD, AND APPARATUS FOR CONTROLLING ION ENERGY DISTRIBUTION IN PLASMA PROCESSING SYSTEMS
|
|