Patent Assignment Details
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| Reel/Frame: | 010541/0204 | |
| Pages: | 4 |
| | Recorded: | 02/01/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/13/2002
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Application #:
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09496315
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Filing Dt:
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02/01/2000
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Title:
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CHEMICAL VAPOR DEPOSITION APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES, ITS DRIVING METHOD, AND METHOD OF OPTIMIZING RECIPE OF CLEANING PROCESS FOR PROCESS CHAMBER
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Assignee
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| 416 MAETAN-DONG, PALKAL-KU |
| SUWON-CITY, KYUNGKI-DO, KOREA, REPUBLIC OF |
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Correspondence name and address
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MARGER, JOHNSON & MCCOLLOM, P.C.
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ALAN T. MCCOLLOM
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1030 S.W. MORRISON STREET
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PORTLAND, OREGON 97205
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