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Patent #:
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Issue Dt:
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06/15/2010
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Application #:
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11676671
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Filing Dt:
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02/20/2007
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Publication #:
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Pub Dt:
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08/21/2008
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Title:
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ANTIREFLECTIVE COATING COMPOSITION BASED ON SILICON POLYMER
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Patent #:
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Issue Dt:
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09/27/2011
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Application #:
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11676673
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Filing Dt:
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02/20/2007
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Publication #:
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Pub Dt:
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08/21/2008
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Title:
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SILICONE COATING COMPOSITION
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Patent #:
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Issue Dt:
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04/12/2011
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Application #:
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11697804
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Filing Dt:
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04/09/2007
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Publication #:
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Pub Dt:
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10/09/2008
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Title:
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COMPOSITION FOR COATING OVER A PHOTORESIST PATTERN COMPRISING A LACTAM
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Patent #:
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Issue Dt:
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08/28/2012
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Application #:
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11844589
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Filing Dt:
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08/24/2007
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Publication #:
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Pub Dt:
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02/26/2009
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Title:
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PHOTORESIST COMPOSITIONS
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Patent #:
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Issue Dt:
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05/06/2014
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Application #:
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11860675
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Filing Dt:
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09/25/2007
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Publication #:
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Pub Dt:
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03/26/2009
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Title:
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THICK FILM RESISTS
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Patent #:
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Issue Dt:
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01/26/2010
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Application #:
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11872738
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Filing Dt:
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10/16/2007
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Publication #:
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Pub Dt:
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07/03/2008
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Title:
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PROCESS FOR THE PREPARATION OF AQUEOUS SUSPENSIONS OF ANIONIC COLLOIDAL SILICA HAVING A NEUTRAL PH AND APPLICATIONS THEREOF
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Patent #:
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Issue Dt:
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09/13/2011
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Application #:
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11872962
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Filing Dt:
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10/16/2007
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Publication #:
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Pub Dt:
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11/27/2008
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Title:
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ANTIREFLECTIVE COATING COMPOSITION COMPRISING FUSED AROMATIC RINGS
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Patent #:
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Issue Dt:
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01/03/2012
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Application #:
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11876793
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Filing Dt:
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10/23/2007
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Publication #:
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Pub Dt:
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04/23/2009
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Title:
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BOTTOM ANTIREFLECTIVE COATING COMPOSITIONS
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Patent #:
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Issue Dt:
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10/18/2011
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Application #:
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11944105
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Filing Dt:
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11/21/2007
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Publication #:
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Pub Dt:
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05/21/2009
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Title:
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ANTIREFLECTIVE COATING COMPOSITION AND PROCESS THEREOF
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Patent #:
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Issue Dt:
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08/02/2011
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Application #:
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12060307
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Filing Dt:
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04/01/2008
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Publication #:
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Pub Dt:
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10/01/2009
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Title:
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ANTIREFLECTIVE COATING COMPOSITION
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Patent #:
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Issue Dt:
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04/26/2011
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Application #:
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12115776
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Filing Dt:
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05/06/2008
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Publication #:
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Pub Dt:
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11/12/2009
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Title:
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ANTIREFLECTIVE COATING COMPOSITION
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Patent #:
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Issue Dt:
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07/17/2012
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Application #:
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12133562
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Filing Dt:
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07/08/2008
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Publication #:
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Pub Dt:
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01/14/2010
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Title:
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ANTIREFLECTIVE COATING COMPOSITIONS
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Patent #:
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Issue Dt:
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12/11/2012
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Application #:
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12133567
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Filing Dt:
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07/08/2008
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Publication #:
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Pub Dt:
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01/14/2010
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Title:
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ANTIREFLECTIVE COATING COMPOSITIONS
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Patent #:
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Issue Dt:
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06/29/2010
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Application #:
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12141307
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Filing Dt:
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06/18/2008
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Publication #:
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Pub Dt:
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12/24/2009
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Title:
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COMPOSITION FOR COATING OVER A PHOTORESIST PATTERN
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Patent #:
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Issue Dt:
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08/16/2011
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Application #:
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12223310
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Filing Dt:
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07/25/2008
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Publication #:
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Pub Dt:
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09/16/2010
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Title:
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PROCESSING LIQUID FOR RESIST SUBSTRATE AND METHOD OF PROCESSING RESIST SUBSTRATE USING THE SAME
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Patent #:
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Issue Dt:
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06/04/2013
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Application #:
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12269072
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Filing Dt:
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11/12/2008
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Publication #:
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Pub Dt:
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05/13/2010
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Title:
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COATING COMPOSITION
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Patent #:
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Issue Dt:
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01/24/2012
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Application #:
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12311725
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Filing Dt:
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04/09/2009
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Publication #:
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Pub Dt:
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01/28/2010
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Title:
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METHOD FOR FORMATION OF MINIATURIZED PATTERN AND RESIST SUBSTRATE TREATMENT SOLUTION FOR USE IN THE METHOD
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Patent #:
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Issue Dt:
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12/27/2011
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Application #:
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12368720
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Filing Dt:
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02/10/2009
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Publication #:
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Pub Dt:
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08/12/2010
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Title:
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HARDMASK PROCESS FOR FORMING A REVERSE TONE IMAGE USING POLYSILAZANE
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Patent #:
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Issue Dt:
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10/25/2011
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Application #:
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12448517
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Filing Dt:
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06/23/2009
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Publication #:
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Pub Dt:
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04/01/2010
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Title:
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COMPOSITION FOR FORMATION OF ANTIREFLECTION FILM AND PATTERN FORMATION METHOD USING THE SAME
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Patent #:
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Issue Dt:
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01/21/2014
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Application #:
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12570923
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Filing Dt:
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09/30/2009
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Publication #:
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Pub Dt:
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03/31/2011
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Title:
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Positive-Working Photoimageable Bottom Antireflective Coating
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Patent #:
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Issue Dt:
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10/08/2013
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Application #:
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12609222
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Filing Dt:
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10/30/2009
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Publication #:
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Pub Dt:
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05/05/2011
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Title:
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Antireflective Composition for Photoresists
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Patent #:
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Issue Dt:
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07/16/2013
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Application #:
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12646191
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Filing Dt:
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12/23/2009
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Publication #:
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Pub Dt:
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06/23/2011
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Title:
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Antireflective Coating Composition and Process Thereof
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Patent #:
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Issue Dt:
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08/13/2013
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Application #:
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12708205
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Filing Dt:
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02/18/2010
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Publication #:
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Pub Dt:
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08/18/2011
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Title:
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Antireflective Compositions and Methods of Using Same
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Patent #:
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Issue Dt:
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03/04/2014
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Application #:
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12733451
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Filing Dt:
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03/02/2010
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Publication #:
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Pub Dt:
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10/07/2010
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Title:
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SILICON-CONTAINING COMPOSITION FOR FINE PATTERN FORMATION AND METHOD FOR FINE PATTERN FORMATION USING THE SAME
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Patent #:
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Issue Dt:
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09/11/2012
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Application #:
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12739298
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Filing Dt:
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04/22/2010
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Publication #:
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Pub Dt:
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09/16/2010
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Title:
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POLYSILAZANE-CONTAINING COMPOSITION CAPABLE OF FORMING A DENSE SILICEOUS FILM
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Patent #:
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Issue Dt:
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10/29/2013
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Application #:
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12747652
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Filing Dt:
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06/11/2010
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Publication #:
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Pub Dt:
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11/11/2010
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Title:
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COMPOSITION FOR FORMATION OF TOP ANTIREFLECTIVE FILM, AND PATTERN FORMATION METHOD USING THE COMPOSITION
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Patent #:
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Issue Dt:
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05/21/2013
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Application #:
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12792994
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Filing Dt:
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06/03/2010
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Publication #:
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Pub Dt:
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12/08/2011
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Title:
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Antireflective Coating Composition and Process Thereof
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Patent #:
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Issue Dt:
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10/07/2014
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Application #:
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12845236
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Filing Dt:
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07/28/2010
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Publication #:
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Pub Dt:
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02/02/2012
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Title:
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COMPOSITION FOR COATING OVER A PHOTORESIST PATTERN
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Patent #:
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Issue Dt:
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08/06/2013
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Application #:
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12864529
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Filing Dt:
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07/26/2010
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Publication #:
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Pub Dt:
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12/09/2010
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Title:
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SUPERFINE-PATTERNED MASK, METHOD FOR PRODUCTION THEREOF, AND METHOD EMPLOYING THE SAME FOR FORMING SUPERFINE-PATTERN
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Patent #:
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Issue Dt:
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08/05/2014
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Application #:
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12978740
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Filing Dt:
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12/27/2010
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Publication #:
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Pub Dt:
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06/28/2012
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Title:
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Superfine Pattern Mask, Method for Production Thereof, and Method Employing the Same for forming Superfine Pattern
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Patent #:
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Issue Dt:
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06/18/2013
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Application #:
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13023291
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Filing Dt:
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02/08/2011
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Publication #:
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Pub Dt:
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08/09/2012
| | | | |
Title:
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UNDERLAYER COATING COMPOSITION AND PROCESSES THEREOF
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Patent #:
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Issue Dt:
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12/31/2013
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Application #:
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13131739
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Filing Dt:
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05/27/2011
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Publication #:
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Pub Dt:
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10/06/2011
| | | | |
Title:
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RESIST PATTERN FORMATING METHOD
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Patent #:
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Issue Dt:
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01/07/2014
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Application #:
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13153765
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Filing Dt:
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06/06/2011
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Publication #:
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Pub Dt:
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12/06/2012
| | | | |
Title:
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BOTTOM ANTIREFLECTIVE COATING COMPOSITIONS AND PROCESSES THEREOF
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Patent #:
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Issue Dt:
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10/29/2013
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Application #:
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13164869
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Filing Dt:
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06/21/2011
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Publication #:
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Pub Dt:
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12/27/2012
| | | | |
Title:
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UNDERLAYER COMPOSITION AND PROCESS THEREOF
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Patent #:
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Issue Dt:
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09/09/2014
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Application #:
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13320833
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Filing Dt:
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11/16/2011
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Publication #:
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Pub Dt:
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03/15/2012
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Title:
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ETCHING SOLUTION AND TRENCH ISOLATION STRUCTURE-FORMATION PROCESS EMPOLYING THE SAME
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Patent #:
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Issue Dt:
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04/15/2014
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Application #:
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13327030
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Filing Dt:
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12/15/2011
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Publication #:
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Pub Dt:
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06/20/2013
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Title:
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COMPOSITION FOR FORMING A DEVELOPABLE BOTTOM ANTIREFLECTIVE COATING
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Patent #:
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Issue Dt:
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10/07/2014
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Application #:
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14110324
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Filing Dt:
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10/07/2013
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Publication #:
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Pub Dt:
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01/30/2014
| | | | |
Title:
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UPPER SURFACE ANTIREFLECTIVE FILM FORMING COMPOSITION AND PATTERN FORMING METHOD USING SAME
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