Patent Assignment Details
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Reel/Frame: | 008588/0207 | |
| Pages: | 3 |
| | Recorded: | 05/15/1997 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/29/1998
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Application #:
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08857164
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Filing Dt:
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05/15/1997
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Title:
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ETCH BACK METHOD TO PLANARIZE AN INTERLAYER HAVING A CRITICAL HDP-CVD DEPOSITION PROCESS
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Assignee
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SCIENCE BASED INDUSTRIAL PARK |
123 PAK AVENUE III |
HSIN-CHU, TAIWAN R.O.C |
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Correspondence name and address
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GEORGE O. SAILE
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20 MCINTOSH DRIVE
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POUGHKEEPSIE, NEW YORK 12603
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