Total properties:
65
|
|
Patent #:
|
|
Issue Dt:
|
04/28/1987
|
Application #:
|
06839668
|
Filing Dt:
|
03/14/1986
|
Title:
|
TURBULENT INCINERATION OF COMBUSTIBLE MATERIALS SUPPLIED IN LOW PRESSURE LAMINAR FLOW
|
|
|
Patent #:
|
|
Issue Dt:
|
11/27/1990
|
Application #:
|
07196956
|
Filing Dt:
|
05/20/1988
|
Title:
|
FLAME ARRESTING CONDUIT SECTION, COMBUSTOR AND METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
04/17/1990
|
Application #:
|
07240479
|
Filing Dt:
|
09/06/1988
|
Title:
|
SPRINKLER
|
|
|
Patent #:
|
|
Issue Dt:
|
06/18/1991
|
Application #:
|
07279851
|
Filing Dt:
|
12/05/1988
|
Title:
|
COPPER SULFATE ABSORPTION MASS TO REMOVE A SH3, PH3, B2, H6, GEH4 AND SIH4
|
|
|
Patent #:
|
|
Issue Dt:
|
04/30/1991
|
Application #:
|
07451306
|
Filing Dt:
|
12/15/1989
|
Title:
|
HYDRODYNAMIC FUME SCRUBBER
|
|
|
Patent #:
|
|
Issue Dt:
|
06/14/1994
|
Application #:
|
07937243
|
Filing Dt:
|
08/28/1992
|
Title:
|
PROCESS FOR SORPTION OF HAZARDOUS WASTE PRODUCTS FROM EXHAUST GAS STREAMS
|
|
|
Patent #:
|
|
Issue Dt:
|
03/14/1995
|
Application #:
|
08102100
|
Filing Dt:
|
08/04/1993
|
Title:
|
SCRUBBER STERILIZATION SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
04/22/1997
|
Application #:
|
08395162
|
Filing Dt:
|
02/27/1995
|
Title:
|
METHOD FOR CONCENTRATION AND RECOVERY OF HALOCARBONS FROM EFFLUENT GAS STREAMS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/14/1997
|
Application #:
|
08441774
|
Filing Dt:
|
05/16/1995
|
Title:
|
FLASHBACK PROTECTION APPARATUS AND METHOD FOR SUPPRESSING DEFLAGRATION IN COMBUSTION-SUSCEPTIBLE GAS FLOWS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/26/1998
|
Application #:
|
08572328
|
Filing Dt:
|
12/14/1995
|
Title:
|
AIR PURIFICATION METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
06/22/1999
|
Application #:
|
08602134
|
Filing Dt:
|
02/15/1996
|
Title:
|
POINT-OF-USE CATALYTIC OXIDATION APPARATUS AND METHOD FOR TREATMENT OF VOC-CONTAINING GAS STREAMS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/07/1998
|
Application #:
|
08654780
|
Filing Dt:
|
05/29/1996
|
Title:
|
METALLO-OXOMERIC SCRUBBER COMPOSITIONS
|
|
|
Patent #:
|
|
Issue Dt:
|
02/23/1999
|
Application #:
|
08659865
|
Filing Dt:
|
06/07/1996
|
Title:
|
SYSTEM FOR STABILIZATION OF PRESSURE PERTURBATIONS FROM OXIDATION SYSTEMS FOR TREATMENT OF PROCESS GASES FROM SEMICONDUCTOR MANUFACTURING OPERATIONS
|
|
|
Patent #:
|
|
Issue Dt:
|
12/22/1998
|
Application #:
|
08708256
|
Filing Dt:
|
09/06/1996
|
Title:
|
FLOW-STABILIZED WET SCRUBBER SYSTEM FOR TREATMENT OF PROCESS GASES FROM SEMICONDUCTOR MANUFACTURING OPERATIONS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/14/1998
|
Application #:
|
08759578
|
Filing Dt:
|
12/05/1996
|
Title:
|
METHOD AND APPARATUS FOR CONCENTRATION AND RECOVERY OF HALOCARBONS FROM EFFLUENT GAS STREAMS
|
|
|
Patent #:
|
|
Issue Dt:
|
09/21/1999
|
Application #:
|
08775838
|
Filing Dt:
|
12/31/1996
|
Title:
|
EFFLUENT GAS STREAM TREATMENT SYSTEM HAVING UTILITY FOR OXIDATION TREATMENT OF SEMICONDUCTOR MANUFACTURING EFFLUENT GASES
|
|
|
Patent #:
|
|
Issue Dt:
|
12/08/1998
|
Application #:
|
08778386
|
Filing Dt:
|
12/31/1996
|
Title:
|
CLOG-RESISTANT ENTRY STRUCTURE FOR INTRODUCING A PARTICULATE SOLIDS-CONTAINING AND/OR SOLIDS-FORMING GAS STREAM TO A GAS PROCESSING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
11/10/1998
|
Application #:
|
08778396
|
Filing Dt:
|
12/31/1996
|
Title:
|
WEEPING WEIR GAS/LIQUID INTERFACE STRUCTURE
|
|
|
Patent #:
|
|
Issue Dt:
|
08/10/1999
|
Application #:
|
08857448
|
Filing Dt:
|
05/16/1997
|
Title:
|
CLOG-RESISTANT ENTRY STRUCTURE FOR INTRODUCING A PARTICLE SOLIDS-CONTAINING AND/OR SOLIDS-FORMING GAS STREAM TO A GAS PROCESSING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
03/16/1999
|
Application #:
|
08870705
|
Filing Dt:
|
06/06/1997
|
Title:
|
ALTERNATING WASH/DRY WATER SCRUBBER ENTRY
|
|
|
Patent #:
|
|
Issue Dt:
|
11/28/2000
|
Application #:
|
09005856
|
Filing Dt:
|
01/12/1998
|
Title:
|
APPARATUS AND METHOD FOR CONTROLLED DECOMPOSITION OXIDATION OF GASEOUS POLLUTANTS
|
|
|
Patent #:
|
|
Issue Dt:
|
02/06/2001
|
Application #:
|
09041054
|
Filing Dt:
|
03/10/1998
|
Title:
|
CHAMBER CLEANING MECHANISM
|
|
|
Patent #:
|
|
Issue Dt:
|
01/15/2002
|
Application #:
|
09060675
|
Filing Dt:
|
04/15/1998
|
Publication #:
|
|
Pub Dt:
|
07/19/2001
| | | | |
Title:
|
INTEGRATED ION IMPLANT SCRUBBER SYSTEM
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
09086033
|
Filing Dt:
|
05/28/1998
|
Publication #:
|
|
Pub Dt:
|
07/26/2001
| | | | |
Title:
|
APPARATUS AND METHOD FOR POINT-OF-USE ABATEMENT OF FLUOROCOMPOUNDS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/06/2004
|
Application #:
|
09212107
|
Filing Dt:
|
12/15/1998
|
Title:
|
APPARATUS AND METHOD FOR POINT-OF-USE TREATMENT OF EFFLUENT GAS STREAMS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/15/2002
|
Application #:
|
09228706
|
Filing Dt:
|
01/12/1999
|
Title:
|
APPARATUS AND METHOD FOR CONTROLLED DECOMPOSITION OXIDATION OF GASEOUS POLLUTANTS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/17/2001
|
Application #:
|
09295182
|
Filing Dt:
|
04/20/1999
|
Title:
|
ADVANCED APPARATUS AND METHOD FOR ABATEMENT OF GASEOUS POLLUTANTS
|
|
|
Patent #:
|
|
Issue Dt:
|
11/27/2001
|
Application #:
|
09307058
|
Filing Dt:
|
05/07/1999
|
Title:
|
EFFLUENT GAS STREAM TREATMENT SYSTEM HAVING UTILITY FOR OXIDATION TREATMENT OF SEMICONDUCTOR MANUFACTURING EFFLUENT GASES
|
|
|
Patent #:
|
|
Issue Dt:
|
12/25/2001
|
Application #:
|
09400662
|
Filing Dt:
|
09/20/1999
|
Title:
|
EFFLUENT GAS STREAM TREATMENT SYSTEM HAVING UTILITY FOR OXIDATION TREATMENT OF SEMICONDUCTOR MANUFACTURING EFFLUENT GASES
|
|
|
Patent #:
|
|
Issue Dt:
|
07/23/2002
|
Application #:
|
09420080
|
Filing Dt:
|
10/18/1999
|
Title:
|
FLUORINE ABATEMENT USING STEAM INJECTION IN OXIDATION TREATMENT OF SEMICONDUCTOR MANUFACTURING EFFLUENT GASES
|
|
|
Patent #:
|
|
Issue Dt:
|
12/31/2002
|
Application #:
|
09420107
|
Filing Dt:
|
10/18/1999
|
Title:
|
ABATEMENT OF EFFLUENT FROM CHEMICAL VAPOR DEPOSITION PROCESSES USING LIGAND EXCHANGE RESISTANT METAL-ORGANIC PRECURSOR SOLUTIONS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/21/2002
|
Application #:
|
09420108
|
Filing Dt:
|
10/18/1999
|
Title:
|
ABATEMENT OF EFFLUENTS FROM CHEMICAL VAPOR DEPOSITION PROCESSES USING ORGANOMETALLICSOURCE REAGENTS
|
|
|
Patent #:
|
|
Issue Dt:
|
04/02/2002
|
Application #:
|
09433610
|
Filing Dt:
|
11/02/1999
|
Title:
|
CERAMIC COMPOSITION HAVING HIGH ADSORPTIVE CAPACITY FOR OXYGEN AT ELEVATED TEMPERATURE
|
|
|
Patent #:
|
|
Issue Dt:
|
03/26/2002
|
Application #:
|
09433619
|
Filing Dt:
|
11/02/1999
|
Title:
|
HIGH TEMPERATURE PRESSURE SWING ADSORPTION SYSTEM FOR SEPARATION OF OXYGEN-CONTAINING GAS MIXTURES
|
|
|
Patent #:
|
|
Issue Dt:
|
04/08/2003
|
Application #:
|
09525221
|
Filing Dt:
|
03/14/2000
|
Title:
|
CHAMBER CLEANING MECHANISM
|
|
|
Patent #:
|
|
Issue Dt:
|
06/14/2005
|
Application #:
|
09551279
|
Filing Dt:
|
04/18/2000
|
Title:
|
APPARATUS AND PROCESS FOR THE ABATEMENT OF SEMICONDUCTOR MANUFACTURING EFFLUENTS CONTAINING FLUORINE GAS
|
|
|
Patent #:
|
|
Issue Dt:
|
12/10/2002
|
Application #:
|
09717439
|
Filing Dt:
|
11/21/2000
|
Title:
|
IN-SITU AIR OXIDATION TREATMENT OF MOCVD PROCESS EFFLUENT
|
|
|
Patent #:
|
|
Issue Dt:
|
06/10/2003
|
Application #:
|
09781037
|
Filing Dt:
|
02/09/2001
|
Publication #:
|
|
Pub Dt:
|
08/15/2002
| | | | |
Title:
|
ATMOSPHERIC PRESSURE PLASMA ENHANCED ABATEMENT OF SEMICONDUCTOR PROCESS EFFLUENT SPECIES
|
|
|
Patent #:
|
|
Issue Dt:
|
03/04/2003
|
Application #:
|
09811716
|
Filing Dt:
|
03/19/2001
|
Publication #:
|
|
Pub Dt:
|
11/21/2002
| | | | |
Title:
|
OXYGEN ENHANCED CDA MODIFICATION TO A CDO INTEGRATED SCRUBBER
|
|
|
Patent #:
|
|
Issue Dt:
|
03/25/2003
|
Application #:
|
09828422
|
Filing Dt:
|
04/06/2001
|
Publication #:
|
|
Pub Dt:
|
07/18/2002
| | | | |
Title:
|
ABATEMENT OF EFFLUENTS FROM CHEMICAL VAPOR DEPOSITION PROCESSES USING ORGANOMETALLICSOURCE REAGENTS
|
|
|
Patent #:
|
|
Issue Dt:
|
01/28/2003
|
Application #:
|
09892729
|
Filing Dt:
|
06/27/2001
|
Publication #:
|
|
Pub Dt:
|
12/27/2001
| | | | |
Title:
|
METHOD FOR ABATEMENT OF GASEOUS POLLUTANTS
|
|
|
Patent #:
|
|
Issue Dt:
|
04/22/2003
|
Application #:
|
09911315
|
Filing Dt:
|
07/23/2001
|
Publication #:
|
|
Pub Dt:
|
02/06/2003
| | | | |
Title:
|
METHOD FOR CARBON MONOXIDE REDUCTION DURING THERMAL/WET ABATEMENT OF ORGANIC COMPOUNDS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/08/2007
|
Application #:
|
09970613
|
Filing Dt:
|
10/04/2001
|
Publication #:
|
|
Pub Dt:
|
02/14/2002
| | | | |
Title:
|
EFFLUENT GAS STREAM TREATMENT SYSTEM HAVING UTILITY FOR OXIDATION TREATMENT OF SEMICONDUCTOR MANUFACTURING EFFLUENT GASES
|
|
|
Patent #:
|
|
Issue Dt:
|
11/21/2006
|
Application #:
|
09991822
|
Filing Dt:
|
11/06/2001
|
Publication #:
|
|
Pub Dt:
|
08/15/2002
| | | | |
Title:
|
METHOD FOR DECOMPOSITION OXIDATION OF GASEOUS POLLUTANTS
|
|
|
Patent #:
|
|
Issue Dt:
|
04/01/2003
|
Application #:
|
09997393
|
Filing Dt:
|
11/29/2001
|
Publication #:
|
|
Pub Dt:
|
07/18/2002
| | | | |
Title:
|
INTEGRATED ION IMPLANT SCRUBBER SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
07/22/2003
|
Application #:
|
10022307
|
Filing Dt:
|
12/18/2001
|
Publication #:
|
|
Pub Dt:
|
03/13/2003
| | | | |
Title:
|
METHOD FOR CARBON MONOXIDE REDUCTION DURING THERMAL/WET ABATEMENT OF ORGANIC COMPOUNDS
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10150468
|
Filing Dt:
|
05/17/2002
|
Publication #:
|
|
Pub Dt:
|
10/31/2002
| | | | |
Title:
|
Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10249294
|
Filing Dt:
|
03/28/2003
|
Publication #:
|
|
Pub Dt:
|
09/30/2004
| | | | |
Title:
|
GAS RECOVERY SYSTEM TO IMPROVE THE EFFICIENCY OF ABATEMENTAND/OR IMPLEMENT REUSE/RECLAMATION
|
|
|
Patent #:
|
|
Issue Dt:
|
01/18/2005
|
Application #:
|
10249506
|
Filing Dt:
|
04/15/2003
|
Publication #:
|
|
Pub Dt:
|
10/21/2004
| | | | |
Title:
|
ABATEMENT SYSTEM TARGETING A BY-PASS EFFLUENT STREAM OF A SEMICONDUCTOR PROCESS TOOL
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10249703
|
Filing Dt:
|
05/01/2003
|
Publication #:
|
|
Pub Dt:
|
11/04/2004
| | | | |
Title:
|
GAS PROCESSING SYSTEM COMPRISING A WATER CURTAIN FOR PREVENTING SOLIDS DEPOSITION OF INTERIOR WALLS THEREOF
|
|
|
Patent #:
|
|
Issue Dt:
|
12/21/2004
|
Application #:
|
10278276
|
Filing Dt:
|
10/23/2002
|
Publication #:
|
|
Pub Dt:
|
03/27/2003
| | | | |
Title:
|
ABATEMENT OF EFFLUENT FROM CHEMICAL VAPOR DEPOSITION PROCESSES USING LIGAND EXCHANGE RESISTANT METAL-ORGANIC PRECURSOR SOLUTIONS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/17/2004
|
Application #:
|
10293109
|
Filing Dt:
|
11/13/2002
|
Publication #:
|
|
Pub Dt:
|
04/17/2003
| | | | |
Title:
|
CHAMBER CLEANING MECHANISM
|
|
|
Patent #:
|
|
Issue Dt:
|
10/19/2004
|
Application #:
|
10314727
|
Filing Dt:
|
12/09/2002
|
Publication #:
|
|
Pub Dt:
|
06/10/2004
| | | | |
Title:
|
METHOD AND APPARATUS FOR THE ABATEMENT OF TOXIC GAS COMPONENTS FROM A SEMICONDUCTOR MANUFACTURING PROCESS EFFLUENT STREAM
|
|
|
Patent #:
|
|
Issue Dt:
|
01/25/2005
|
Application #:
|
10316577
|
Filing Dt:
|
12/11/2002
|
Publication #:
|
|
Pub Dt:
|
06/17/2004
| | | | |
Title:
|
INTEGRATED SYSTEM AND PROCESS FOR EFFLUENT ABATEMENT AND ENERGY GENERATION
|
|
|
Patent #:
|
|
Issue Dt:
|
06/15/2004
|
Application #:
|
10358972
|
Filing Dt:
|
02/05/2003
|
Publication #:
|
|
Pub Dt:
|
07/24/2003
| | | | |
Title:
|
ABATEMENT OF EFFLUENTS FROM CHEMICAL VAPOR DEPOSITION PROCESSES USING ORGANOMETALLIC SOURCE REAGENTS
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10370159
|
Filing Dt:
|
02/19/2003
|
Publication #:
|
|
Pub Dt:
|
08/19/2004
| | | | |
Title:
|
Low pressure drop canister for fixed bed scrubber applications and method of using same
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10379850
|
Filing Dt:
|
03/05/2003
|
Publication #:
|
|
Pub Dt:
|
09/09/2004
| | | | |
Title:
|
FREEWIRE SYSTEM FOR SUPPRESSION OF PARTICULATE DEPOSITION AND ACCUMULATION ON PROCESSING CHAMBER WALLS
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10390475
|
Filing Dt:
|
03/17/2003
|
Publication #:
|
|
Pub Dt:
|
09/23/2004
| | | | |
Title:
|
Scrubber system for pretreatment of an effluent waste stream containing arsenic
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10665861
|
Filing Dt:
|
09/18/2003
|
Publication #:
|
|
Pub Dt:
|
05/27/2004
| | | | |
Title:
|
Apparatus and method for point-of-use treatment of effluent gas streams
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10665870
|
Filing Dt:
|
09/18/2003
|
Publication #:
|
|
Pub Dt:
|
03/24/2005
| | | | |
Title:
|
Chemisorbent system for abatement of effluent species
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10693413
|
Filing Dt:
|
10/24/2003
|
Publication #:
|
|
Pub Dt:
|
04/28/2005
| | | | |
Title:
|
Gas-using facility including portable dry scrubber system and/or over-pressure control arrangement
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10720398
|
Filing Dt:
|
11/24/2003
|
Publication #:
|
|
Pub Dt:
|
05/26/2005
| | | | |
Title:
|
Method and apparatus for the recovery of volatile organic compounds and concentration thereof
|
|
|
Patent #:
|
|
Issue Dt:
|
08/04/2009
|
Application #:
|
10742126
|
Filing Dt:
|
12/19/2003
|
Publication #:
|
|
Pub Dt:
|
06/23/2005
| | | | |
Title:
|
APPARATUS AND METHOD FOR CONTROLLED COMBUSTION OF GASEOUS POLLUTANTS
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10849435
|
Filing Dt:
|
05/19/2004
|
Publication #:
|
|
Pub Dt:
|
10/28/2004
| | | | |
Title:
|
Apparatus for point-of-use treatment of effluent gas streams
|
|
|
Patent #:
|
|
Issue Dt:
|
04/29/2008
|
Application #:
|
10928977
|
Filing Dt:
|
08/27/2004
|
Publication #:
|
|
Pub Dt:
|
03/17/2005
| | | | |
Title:
|
METHOD AND APPARATUS FOR THE ABATEMENT OF TOXIC GAS COMPONENTS FROM A SEMICONDUCTOR MANUFACTURING PROCESS EFFLUENT STREAM
|
|