Patent Assignment Details
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| Reel/Frame: | 013001/0212 | |
| Pages: | 3 |
| | Recorded: | 06/03/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/28/2005
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Application #:
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10161840
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Filing Dt:
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06/03/2002
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Publication #:
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Pub Dt:
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01/16/2003
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Title:
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ENVIRONMENT EXCHANGE CONTROL FOR MATERIAL ON A WAFER SURFACE
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Assignee
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| SUITE 400 |
| 101 METRO DRIVE |
| SAN JOSE, CALIFORNIA 95110 |
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Correspondence name and address
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WILSON SONSINI GOODRICH & ROSATI
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JOHN GILMORE
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650 PAGE MILL ROAD
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PALO ALTO, CA 94304-1050
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