Patent Assignment Details
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| Reel/Frame: | 012919/0213 | |
| Pages: | 6 |
| | Recorded: | 05/20/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/09/2004
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Application #:
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10151425
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Filing Dt:
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05/20/2002
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Publication #:
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Pub Dt:
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11/20/2003
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Title:
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METHOD AND APPARATUS FOR VHF PLASMA PROCESSING WITH LOAD MISMATCH RELIABILITY AND STABILITY
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Assignee
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| 100 HIGHPOWER ROAD |
| ROCHESTER, NEW YORK 14623 |
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Correspondence name and address
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HARNESS, DICKEY & PIERCE, P.L.C.
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ALAN L. CASSEL
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5445 CORPORATE DRIVE
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SUITE 400
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TROY, MICHIGAN 48098-2683
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