Patent Assignment Details
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| Reel/Frame: | 008169/0216 | |
| Pages: | 3 |
| | Recorded: | 08/23/1996 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/23/2002
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Application #:
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08701943
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Filing Dt:
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08/23/1996
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Title:
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APPARATUS AND METHOD FOR SEMICONDUCTOR WAFER PROCESSING SYSTEM
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Assignee
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| NO, 1, CREATION RD. 1, SCIENCE-BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN R.O.C |
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Correspondence name and address
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TOWNSEND AND TOWNSEND AND CREW LLP
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ROSA S. KIM
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TWO EMBARCADERO CENTER, 8TH FLOOR
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SAN FRANCISCO, CALIFORNIA 94111-3834
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