Patent Assignment Details
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| Reel/Frame: | 013689/0217 | |
| Pages: | 3 |
| | Recorded: | 01/14/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10342575
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Filing Dt:
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01/14/2003
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Publication #:
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Pub Dt:
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02/12/2004
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Title:
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Etch chamber with dual frequency biasing sources and a single frequency plasma generating source
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Assignee
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| 3050 BOWERS AVENUE |
| POST OFFICE BOX 450A |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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APPLIED MATERIALS INC.
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PATENT COUNSEL
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POST OFFICE BOX 450A
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SANTA CLARA, CA 95052
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