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Reel/Frame:008728/0224   Pages: 3
Recorded: 07/21/1997
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
10/17/2000
Application #:
08897439
Filing Dt:
07/21/1997
Title:
METHOD OF FORMING A FILM BY USING PLASMANIZED PROCESS GAS CONTAINING GASEOUS H20 AND AN AUXILIARY GAS IN A SEMICONDUCTOR DEVICE
Assignors
1
Exec Dt:
07/10/1997
2
Exec Dt:
07/10/1997
3
Exec Dt:
07/10/1997
Assignees
1
11-28 MITA 3-CHOME, MINATO-KU
TOKYO, JAPAN
2
13-29 KONAN 2-CHOME, MINATO-KU
TOKYO, JAPAN
Correspondence name and address
LORUSSO & LOUD
GEORGE A. LOUD
3137 MT. VERNON AVENUE
ALEXANDRIA, VA 22305

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