Patent Assignment Details
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Reel/Frame: | 008728/0224 | |
| Pages: | 3 |
| | Recorded: | 07/21/1997 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/17/2000
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Application #:
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08897439
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Filing Dt:
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07/21/1997
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Title:
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METHOD OF FORMING A FILM BY USING PLASMANIZED PROCESS GAS CONTAINING GASEOUS H20 AND AN AUXILIARY GAS IN A SEMICONDUCTOR DEVICE
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Assignees
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11-28 MITA 3-CHOME, MINATO-KU |
TOKYO, JAPAN |
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13-29 KONAN 2-CHOME, MINATO-KU |
TOKYO, JAPAN |
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Correspondence name and address
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LORUSSO & LOUD
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GEORGE A. LOUD
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3137 MT. VERNON AVENUE
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ALEXANDRIA, VA 22305
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