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Patent Assignment Details

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Reel/Frame:	019341/0224			Pages:	6
		Recorded:	05/25/2007
Attorney Dkt #:	103175/167723
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 16

Patent #:	4604718	Issue Dt:	08/05/1986	Application #:	06488095	Filing Dt:	04/25/1983
Title:	COMPUTER SIMULATION SYSTEM

Patent #:	6216138	Issue Dt:	04/10/2001	Application #:	08231531	Filing Dt:	04/22/1994
Title:	COMPUTER INTERFACE SYSTEM FOR AUTOMATICALLY GENERATING GRAPHICAL REPRESENTATIONS OF COMPUTER OPERATIONS LINKED TOGETHER ACCORDING TO FUNCTIONAL RELATIONSHIPS

Patent #:	5895596	Issue Dt:	04/20/1999	Application #:	08791024	Filing Dt:	01/27/1997
Title:	MODEL BASED TEMPERATURE CONTROLLER FOR SEMICONDUCTOR THERMAL PROCESSORS

Patent #:	6441350	Issue Dt:	08/27/2002	Application #:	09386565	Filing Dt:	08/31/1999
Title:	TEMPERATURE CONTROL SYSTEM FOR A THERMAL REACTOR

Patent #:	6207937	Issue Dt:	03/27/2001	Application #:	09386567	Filing Dt:	08/31/1999
Title:	TEMPERATURE CONTROL SYSTEM FOR A THERMAL REACTOR

Patent #:	6211495	Issue Dt:	04/03/2001	Application #:	09386678	Filing Dt:	08/31/1999
Title:	TEMPERATURE CONTROL SYSTEM FOR A THERMAL REACTOR

Patent #:	6222164	Issue Dt:	04/24/2001	Application #:	09387001	Filing Dt:	08/31/1999
Title:	TEMPERATURE CONTROL SYSTEM FOR A THERMAL REACTOR

Patent #:	6587744	Issue Dt:	07/01/2003	Application #:	09599357	Filing Dt:	06/20/2000
Title:	RUN-TO-RUN CONTROLLER FOR USE IN MICROELECTRONIC FABRICATION

Patent #:	NONE	Issue Dt:		Application #:	09804971	Filing Dt:	03/13/2001
Publication #:	US20020161618	Pub Dt:	10/31/2002
Title:	Integrated scheduler and material control system

Patent #:	6671570	Issue Dt:	12/30/2003	Application #:	09978500	Filing Dt:	10/16/2001
Publication #:	US20020116083	Pub Dt:	08/22/2002
Title:	SYSTEM AND METHOD FOR AUTOMATED MONITORING AND ASSESSMENT OF FABRICATION FACILITY

Patent #:	6725098	Issue Dt:	04/20/2004	Application #:	10046359	Filing Dt:	10/23/2001
Publication #:	US20030078680	Pub Dt:	04/24/2003
Title:	SEMICONDUCTOR RUN-TO-RUN CONTROL SYSTEM WITH MISSING AND OUT-OF-ORDER MEASUREMENT HANDLING

Patent #:	6842660	Issue Dt:	01/11/2005	Application #:	10162733	Filing Dt:	06/05/2002
Publication #:	US20030083754	Pub Dt:	05/01/2003
Title:	DEVICE AND METHOD FOR COMMUNICATING DATA IN A PROCESS CONTROL SYSTEM

Patent #:	6748280	Issue Dt:	06/08/2004	Application #:	10171758	Filing Dt:	06/14/2002
Title:	SEMICONDUCTOR RUN-TO-RUN CONTROL SYSTEM WITH STATE AND MODEL PARAMETER ESTIMATION

Patent #:	7185325	Issue Dt:	02/27/2007	Application #:	10226907	Filing Dt:	08/23/2002
Publication #:	US20030051229	Pub Dt:	03/13/2003
Title:	APPLICATION CLASS EXTENSIONS

Patent #:	7087443	Issue Dt:	08/08/2006	Application #:	10628981	Filing Dt:	07/29/2003
Publication #:	US20050026460	Pub Dt:	02/03/2005
Title:	OPTIMIZED TEMPERATURE CONTROLLER FOR COLD MASS INTRODUCTION

Assignor

Exec Dt:

03/27/2007

Assignee

3050 BOWERS AVENUE

P.O. BOX 58039

SANTA CLARA, CALIFORNIA 95054-3299

Correspondence name and address
	GOODWIN PROCTER LLP
	EXCHANGE PLACE
	BOSTON, MA 02109

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