Patent Assignment Details
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| Reel/Frame: | 025617/0231 | |
| Pages: | 5 |
| | Recorded: | 01/11/2011 | | |
| Attorney Dkt #: | 18233-0036001 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/17/2013
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Application #:
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12917956
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Filing Dt:
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11/02/2010
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Publication #:
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Pub Dt:
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05/05/2011
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Title:
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ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHY PROJECTION EXPOSURE APPARATUS, MICROLITHOGRAPHY PROJECTION EXPOSURE APPARATUS COMPRISING SUCH AN ILLUMINATION SYSTEM, AND FOURIER OPTICAL SYSTEM
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Assignee
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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Correspondence name and address
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SEAN P. DALEY
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FISH & RICHARDSON P.C.
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P.O.BOX 1022
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MINNEAPOLIS, MN 55440-1022
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