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Reel/Frame:029323/0231   Pages: 3
Recorded: 11/19/2012
Attorney Dkt #:TDC-036
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
13680929
Filing Dt:
11/19/2012
Publication #:
Pub Dt:
05/22/2014
Title:
CAPACITIVELY COUPLED PLASMA EQUIPMENT WITH UNIFORM PLASMA DENSITY
Assignor
1
Exec Dt:
11/15/2012
Assignee
1
AKASAKA BIZ TOWER
3-1 AKASAKA 5-CHROME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondence name and address
TOKYO ELECTRON U.S. HOLDINGS, INC.
2545 W. FRYE RD.
SUITE 1
CHANDLER, AZ 85224

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