Patent Assignment Details
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Reel/Frame: | 044135/0234 | |
| Pages: | 4 |
| | Recorded: | 11/15/2017 | | |
Attorney Dkt #: | 078697.00104 (P4947US1) |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/26/2020
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Application #:
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15574294
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Filing Dt:
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11/15/2017
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Publication #:
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Pub Dt:
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10/11/2018
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Title:
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Systems and Methods for Optimizing Focus for Imaging-Based Overlay Metrology
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Assignee
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ONE TECHNOLOGY DRIVE |
MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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KLA-TENCOR CORPORATION / HODGSON RUSS LL
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THE GUARANTY BUILDING
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140 PEARL STREET, SUITE 100
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BUFFALO, NY 14202-4040
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