Patent Assignment Details
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| Reel/Frame: | 018202/0236 | |
| Pages: | 4 |
| | Recorded: | 09/05/2006 | | |
| Attorney Dkt #: | 29756-1 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10961798
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Filing Dt:
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10/08/2004
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Publication #:
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Pub Dt:
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05/19/2005
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Title:
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Apparatus and method for real time measurement of substrate temperatures for use in semiconductor growth and wafer processing
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Assignee
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| 3626 WEST LIBERTY ROAD |
| ANN ARBOR, MICHIGAN 48103 |
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Correspondence name and address
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JON E. SHACKELFORD
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38525 WOODWARD AVENUE
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SUITE 2000
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BLOOMFIELD HILLS, MI 48304-2970
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