Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
| Reel/Frame: | 028520/0241 | |
| Pages: | 3 |
| | Recorded: | 07/10/2012 | | |
| Attorney Dkt #: | 1110-105825 (301110-193) |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
|
|
Total properties:
1
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/04/2012
|
Application #:
|
12148969
|
Filing Dt:
|
04/24/2008
|
|
Publication #:
|
|
Pub Dt:
|
02/04/2010
| | | | |
|
Title:
|
METHOD FOR CLEANING OPTICAL ELEMENT OF EUV LIGHT SOURCE DEVICE AND OPTICAL ELEMENT CLEANING DEVICE
|
|
|
Assignee
|
|
|
|
|
| 400 YOKOKURASHINDEN, OYAMA-SHI |
| TOCHIGI-KEN, JAPAN 323-8558 |
|
|
Correspondence name and address
|
| |
GERALD T. SHEKLETON
|
| |
120 S. RIVERSIDE PLAZA, 22ND FLOOR
|
| |
CHICAGO, IL 60606
|
Search Results as of:
05/24/2024 04:56 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
