Patent Assignment Details
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| Reel/Frame: | 018777/0242 | |
| Pages: | 3 |
| | Recorded: | 01/19/2007 | | |
| Attorney Dkt #: | 102-0164US, 0164US1 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
2
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Patent #:
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Issue Dt:
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11/07/2000
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Application #:
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09340985
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Filing Dt:
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06/28/1999
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Title:
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METHOD AND APPARATUS FOR USING PHOTOEMISSION TO DETERMINE THE ENDPOINT OF AN ETCH PROCESS
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Patent #:
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Issue Dt:
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11/06/2001
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Application #:
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09680246
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Filing Dt:
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10/05/2000
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Title:
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Method and apparatus for using photoemission to determine the endpoint of an etch process
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Assignee
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| 8000 S. FEDERAL WAY |
| P.O. BOX 6 |
| BOISE, IDAHO 83707 |
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Correspondence name and address
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TERRIL G. LEWIS
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20333 SH 249 SUITE 600
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HOUSTON, TX 77070
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