Total properties:
23
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Patent #:
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Issue Dt:
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02/29/2000
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Application #:
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09136897
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Filing Dt:
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08/19/1998
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Title:
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SYSTEM AND METHOD FOR SIMULTANEOUSLY MEASURING LUBRICANT THICKNESS AND DEGRADATION, THIN FILM THICKNESS AND WEAR, AND SURFACE ROUGHNESS
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Patent #:
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Issue Dt:
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04/06/2004
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Application #:
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09347622
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Filing Dt:
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07/02/1999
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Title:
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SYSTEM FOR SIMULTANEOUSLY MEASURING THIN FILM LAYER THICKNESS, REFLECTIVITY, ROUGHNESS, SURFACE PROFILE AND MAGNETIC PATTERN
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Patent #:
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Issue Dt:
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07/31/2001
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Application #:
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09376151
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Filing Dt:
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08/17/1999
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Title:
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SYSTEM AND METHOD FOR MEASURING THIN FILM PROPERTIES AND ANALYZING TWO-DIMENSIONAL HISTOGRAMS USING AND/NOT OPERATIONS
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Patent #:
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Issue Dt:
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10/10/2000
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Application #:
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09376152
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Filing Dt:
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08/17/1999
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Title:
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SYSTEM AND METHOD FOR MEASURING THIN FILM PROPERTIES AND ANALYZING TWO-DIMENSIONAL HISTOGRAMS USING A SYMMETRY OPERATION
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Patent #:
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Issue Dt:
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05/08/2001
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Application #:
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09376705
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Filing Dt:
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08/17/1999
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Title:
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SYSTEM AND METHOD FOR MEASURING THIN FILM PROPERTIES AND ANALYZING TWO-DIMENSIONAL HISTOGRAMS USING SUBSTRACTION OPERATION
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Patent #:
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Issue Dt:
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03/06/2001
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Application #:
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09376711
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Filing Dt:
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08/17/1999
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Title:
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HIGH TEMPERATURE THIN FILM PROPERTY MEASUREMENT SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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12/16/2003
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Application #:
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09414388
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Filing Dt:
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10/07/1999
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Title:
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SYSTEM AND METHOD FOR SIMULTANEOUSLY MEASURING THIN FILM LAYER THICKNESS, REFLECTIVITY, ROUGHNESS, SURFACE PROFILE AND MAGNETIC PATTERN IN THIN FILM MAGNETIC DISKS AND SILICON WAFERS
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Patent #:
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Issue Dt:
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05/21/2002
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Application #:
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09718054
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Filing Dt:
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11/20/2000
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Title:
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High speed optical profilometer for measuring surface height variation
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09818199
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Filing Dt:
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03/26/2001
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Publication #:
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Pub Dt:
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02/07/2002
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Title:
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Combined high speed optical profilometer and ellipsometer
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Patent #:
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Issue Dt:
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06/29/2004
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Application #:
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09861280
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Filing Dt:
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05/18/2001
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Title:
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COMBINED HIGH SPEED OPTICAL PROFILOMETER AND ELLIPSOMETER
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Patent #:
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Issue Dt:
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05/24/2005
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Application #:
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10029957
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Filing Dt:
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12/21/2001
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Publication #:
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Pub Dt:
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10/10/2002
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Title:
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MATERIAL INDEPENDENT OPTICAL PROFILOMETER
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Patent #:
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Issue Dt:
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08/16/2005
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Application #:
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10126154
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Filing Dt:
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04/19/2002
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Publication #:
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Pub Dt:
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11/07/2002
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Title:
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MULTIPLE SPOT SIZE OPTICAL PROFILOMETER, ELLIPSOMETER, REFLECTOMETER AND SCATTEROMETER
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Patent #:
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Issue Dt:
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04/19/2005
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Application #:
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10208379
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Filing Dt:
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07/29/2002
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Publication #:
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Pub Dt:
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10/23/2003
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Title:
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METHOD OF DETECTING THE THICKNESS OF THIN FILM DISKS OR WAFERS
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|
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Patent #:
|
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Issue Dt:
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06/21/2005
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Application #:
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10219632
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Filing Dt:
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08/14/2002
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Publication #:
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Pub Dt:
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02/06/2003
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Title:
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METHOD OF DETECTING AND CLASSIFYING SCRATCHES, PARTICLES AND PITS ON THIN FILM DISKS OR WAFERS
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Patent #:
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|
Issue Dt:
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08/24/2004
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Application #:
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10406075
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Filing Dt:
|
04/02/2003
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Title:
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METHOD OF AUTOMATICALLY FOCUSING AN OPTICAL BEAM ON TRANSPARENT OR REFLECTIVE THIN FILM WAFERS OR DISKS
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Patent #:
|
|
Issue Dt:
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10/17/2006
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Application #:
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10444652
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Filing Dt:
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05/22/2003
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Publication #:
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Pub Dt:
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01/29/2004
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Title:
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METHOD OF DETECTING AND CLASSIFYING SCRATCHES AND PARTICLES ON THIN FILM DISKS OR WAFERS
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Patent #:
|
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Issue Dt:
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10/18/2005
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Application #:
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10660984
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Filing Dt:
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09/12/2003
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Publication #:
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Pub Dt:
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03/11/2004
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Title:
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SYSTEM AND METHOD FOR MEASURING OBJECT CHARACTERISTICS USING PHASE DIFFERENCES IN POLARIZED LIGHT REFLECTIONS
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Patent #:
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Issue Dt:
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06/13/2006
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Application #:
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10754275
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Filing Dt:
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01/08/2004
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Publication #:
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Pub Dt:
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09/02/2004
| | | | |
Title:
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SYSTEM AND METHOD FOR DOUBLE SIDED OPTICAL INSPECTION OF THIN FILM DISKS OR WAFERS
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|
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Patent #:
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|
Issue Dt:
|
10/18/2005
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Application #:
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10782267
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Filing Dt:
|
02/18/2004
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Publication #:
|
|
Pub Dt:
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08/19/2004
| | | | |
Title:
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SYSTEM AND METHOD FOR MEASURING PROPERTIES OF AN OBJECT USING A PHASE DIFFERENCE BETWEEN TWO REFLECTED LIGHT SIGNALS
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|
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Patent #:
|
|
Issue Dt:
|
07/11/2006
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Application #:
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10867609
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Filing Dt:
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06/14/2004
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Title:
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SYSTEM AND METHOD FOR AUTOMATICALLY DETERMINING MAGNETIC ECCENTRICITY OF A DISK
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|
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Patent #:
|
|
Issue Dt:
|
07/11/2006
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Application #:
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10873892
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Filing Dt:
|
06/21/2004
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Publication #:
|
|
Pub Dt:
|
11/25/2004
| | | | |
Title:
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COMBINED HIGH SPEED OPTICAL PROFILOMETER AND ELLIPSOMETER
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|
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Patent #:
|
|
Issue Dt:
|
09/26/2006
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Application #:
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10890774
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Filing Dt:
|
07/13/2004
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Title:
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MATERIAL INDEPENDENT OPTICAL PROFILOMETER
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|
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Patent #:
|
|
Issue Dt:
|
07/08/2008
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Application #:
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10952590
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Filing Dt:
|
09/28/2004
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Title:
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SYSTEM AND METHOD FOR OPTIMIZING WAFER FLATNESS AT HIGH ROTATIONAL SPEEDS
|
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