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Total properties:
91
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12/09/2003
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09717182
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Filing Dt:
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11/21/2000
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Title:
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DIAMOND-LIKE CARBON FILM WITH ENHANCED ADHESION
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10/21/2003
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09727810
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Filing Dt:
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12/01/2000
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Publication #:
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Pub Dt:
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10/25/2001
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Title:
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GAS CLUSTER ION BEAM LOW MASS ION FILTER
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09/02/2003
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09727881
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12/01/2000
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Publication #:
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Pub Dt:
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06/06/2002
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Title:
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METHOD AND APPARATUS FOR SMOOTHING THIN CONDUCTIVE FILMS BY GAS CLUSTER ION BEAM
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10/07/2003
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09733211
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12/08/2000
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Publication #:
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Pub Dt:
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11/07/2002
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Title:
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Patent #:
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Issue Dt:
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05/18/2004
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Application #:
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09811904
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Filing Dt:
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03/19/2001
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Publication #:
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Pub Dt:
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12/27/2001
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Title:
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DETECTOR AND METHOD FOR CLUSTER ION BEAM DIAGNOSTICS
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Patent #:
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Issue Dt:
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06/15/2004
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Application #:
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09842540
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Filing Dt:
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04/26/2001
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Publication #:
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Pub Dt:
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01/17/2002
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Title:
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SYSTEM AND METHOD FOR ADJUSTING THE PROPERTIES OF A DEVICE BY GCIB PROCESSING
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Patent #:
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Issue Dt:
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10/19/2004
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Application #:
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09999099
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Filing Dt:
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10/31/2001
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Publication #:
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Pub Dt:
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10/03/2002
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Title:
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ADAPTIVE GCIB FOR SMOOTHING SURFACES
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Patent #:
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Issue Dt:
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11/11/2003
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Application #:
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10036179
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12/26/2001
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Publication #:
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Pub Dt:
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09/19/2002
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Title:
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05/27/2008
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10667006
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09/19/2003
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Publication #:
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Pub Dt:
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06/17/2004
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Title:
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10/03/2006
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10701573
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11/05/2003
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Publication #:
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Pub Dt:
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07/15/2004
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Title:
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GCIB PROCESSING OF INTEGRATED CIRCUIT INTERCONNECT STRUCTURES
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06/27/2006
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10765246
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01/27/2004
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Pub Dt:
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11/11/2004
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Title:
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08/21/2007
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11057653
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02/14/2005
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Pub Dt:
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08/18/2005
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Title:
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METHODS OF FORMING DOPED AND UN-DOPED STRAINED SEMICONDUCTOR MATERIALS AND SEMICONDUCTOR FILMS BY GAS-CLUSTER-ION-BEAM IRRADIATION AND MATERIALS AND FILM PRODUCTS
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07/08/2008
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11080800
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03/11/2005
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Pub Dt:
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09/15/2005
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Title:
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06/13/2006
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11082584
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03/17/2005
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Publication #:
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Pub Dt:
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09/22/2005
| | | | |
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Title:
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METHOD AND APPARATUS FOR IMPROVED BEAM STABILITY IN HIGH CURRENT GAS-CLUSTER ION BEAM PROCESSING SYSTEM
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06/13/2006
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11084632
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03/18/2005
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Pub Dt:
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09/22/2005
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Title:
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METHOD AND APPARATUS FOR IMPROVED PROCESSING WITH A GAS-CLUSTER ION BEAM
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07/20/2010
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11143421
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06/02/2005
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12/08/2005
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Title:
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Issue Dt:
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08/12/2008
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11150698
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06/11/2005
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Pub Dt:
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12/15/2005
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Title:
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02/06/2007
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11257524
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10/25/2005
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Pub Dt:
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05/11/2006
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Title:
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Patent #:
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03/18/2008
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11259549
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10/25/2005
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Pub Dt:
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04/27/2006
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Title:
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11/06/2007
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11269382
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11/08/2005
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Pub Dt:
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05/18/2006
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Title:
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10/27/2009
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11565267
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11/30/2006
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11/15/2007
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09/21/2010
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11671813
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02/06/2007
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08/09/2007
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COPPER INTERCONNECT WIRING AND METHOD AND APPARATUS FOR FORMING THEREOF
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06/23/2009
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11694557
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03/30/2007
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10/02/2008
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06/23/2009
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11694572
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03/30/2007
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10/02/2008
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Title:
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METHODS AND PROCESSING SYSTEMS FOR USING A GAS CLUSTER ION BEAM TO OFFSET SYSTEMATIC NON-UNIFORMITIES IN WORKPIECES PROCESSED IN A PROCESS TOOL
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07/21/2009
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06/28/2007
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01/01/2009
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METHODS AND APPARATUS FOR ASSIGNING A BEAM INTENSITY PROFILE TO A GAS CLUSTER ION BEAM USED TO PROCESS WORKPIECES
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01/05/2010
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11775494
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07/10/2007
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02/28/2008
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03/29/2011
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11832198
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08/01/2007
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02/05/2009
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12/01/2009
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11850423
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09/05/2007
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03/05/2009
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METHODS FOR MODIFYING FEATURES OF A WORKPIECE USING A GAS CLUSTER ION BEAM
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07/19/2011
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11863036
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09/27/2007
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04/02/2009
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04/13/2010
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11864302
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09/28/2007
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04/02/2009
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07/13/2010
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11864318
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09/28/2007
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04/02/2009
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02/12/2013
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11864330
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09/28/2007
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04/02/2009
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10/23/2012
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11864461
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09/28/2007
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04/02/2009
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10/30/2012
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11864489
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09/28/2007
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04/02/2009
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09/14/2010
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11864961
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09/29/2007
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04/02/2009
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11/02/2010
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11950128
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12/04/2007
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06/04/2009
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02/08/2011
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12020094
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01/25/2008
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07/30/2009
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08/11/2015
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12144968
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06/24/2008
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12/24/2009
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METHOD AND SYSTEM FOR GROWING A THIN FILM USING A GAS CLUSTER ION BEAM
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03/15/2011
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12145156
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06/24/2008
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12/24/2009
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08/17/2010
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12182363
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07/30/2008
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02/04/2010
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06/19/2012
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12184517
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08/01/2008
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02/04/2010
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05/24/2011
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09/11/2008
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03/11/2010
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11/16/2010
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12235874
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09/23/2008
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03/25/2010
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11/20/2012
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09/24/2008
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03/25/2010
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06/05/2012
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12/18/2008
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04/23/2009
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06/28/2011
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02/09/2009
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08/12/2010
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METHOD FOR FORMING TRENCH ISOLATION USING A GAS CLUSTER ION BEAM GROWTH PROCESS
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01/18/2011
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02/11/2009
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02/04/2010
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05/24/2011
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12394215
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02/27/2009
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09/02/2010
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07/24/2012
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03/06/2009
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09/09/2010
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11/23/2010
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12412749
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03/27/2009
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07/23/2009
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METHOD OF FORMING CAPPING STRUCTURES ON ONE OR MORE MATERIAL LAYER SURFACES
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07/19/2011
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12415755
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03/31/2009
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09/30/2010
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METHOD FOR MODIFYING A MATERIAL LAYER USING GAS CLUSTER ION BEAM PROCESSING
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11/04/2014
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12415867
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03/31/2009
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09/30/2010
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METHOD FOR ENHANCING A SUBSTRATE USING GAS CLUSTER ION BEAM PROCESSING
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03/17/2015
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04/23/2009
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08/05/2010
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11/06/2012
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04/23/2009
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08/05/2010
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11/01/2011
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10/08/2009
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04/14/2011
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08/07/2012
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12575931
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10/08/2009
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04/14/2011
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03/31/2015
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01/15/2010
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07/21/2011
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01/17/2012
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12732818
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03/26/2010
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08/05/2010
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05/01/2012
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12749999
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03/30/2010
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07/22/2010
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05/08/2012
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12774050
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05/05/2010
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11/10/2011
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12/25/2012
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05/05/2010
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11/10/2011
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05/29/2012
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09/01/2010
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05/19/2011
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11/26/2013
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07/13/2011
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11/03/2011
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08/20/2013
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03/07/2013
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10/15/2013
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03/07/2013
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08/20/2013
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09/01/2011
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03/07/2013
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04/08/2014
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09/01/2011
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03/07/2013
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GAS CLUSTER ION BEAM ETCH PROFILE CONTROL USING BEAM DIVERGENCE
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07/29/2014
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03/02/2012
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09/06/2012
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05/20/2014
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06/08/2012
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12/12/2013
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04/08/2014
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11/16/2012
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03/28/2013
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04/26/2016
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08/01/2013
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05/13/2014
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12/12/2013
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04/22/2014
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05/07/2013
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08/29/2013
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04/29/2014
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04/05/2016
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05/08/2014
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12/08/2015
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02/26/2015
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05/12/2015
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08/27/2015
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08/11/2015
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05/21/2015
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08/04/2016
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11/19/2015
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01/23/2018
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04/06/2021
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12/08/2020
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02/27/2020
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