Patent Assignment Details
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Reel/Frame: | 009050/0246 | |
| Pages: | 3 |
| | Recorded: | 03/17/1998 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/27/1999
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Application #:
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09042809
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Filing Dt:
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03/17/1998
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Title:
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ELECTROSTATIC DEFLECTING ELECTRODE UNIT FOR USE IN CHARGED BEAM LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURE THE SAME
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Assignee
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72 HORIKAWA-CHO |
SAIWAI-KU, KAWASAKI-SHI, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND ET AL.
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MARVIN J. SPIVAK
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ATTORNEYS AT LAW
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1755 JEFFERSON DAVIS HIGHWAY, FOURTH FLR
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ARLINGTON, VIRGINIA 22202
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